基于SU8020扫描电镜光学系统合轴研究  

Study on the Coincidence of Optical System Based on SU8020 Scanning Electron Microscope

作　　者：吴文涛[1] 徐磊[1] 王振亚[1] 

机构地区：[1]中国电子科技集团公司第五十五研究所,江苏南京210016

出　　处：《电子工业专用设备》2017年第1期14-18,共5页Equipment for Electronic Products Manufacturing

摘　　要：详述了扫描电镜的工作原理,特点;SU8020扫描电镜基本结构和光学系统的详细构成,以及如何使SU8020扫描电镜更快,更好地进行光学系统的合轴调试,从而使SU8020扫描电镜处于最佳的工作状态。The working principle and characteristics of scanning electron microscope are described. The basic structure of SU8020 scanning electron microscope and detailed structure of the optical system, as well as how to make SU8020 scanning faster, the coincidence of the optical system debugging better, so that the SU8020 scanning electron microscope in the best working condition.

关 键 词：扫描电镜 光学系统 合轴 

分 类 号：TN206[电子电信—物理电子学]