激光传感器光轴垂直度误差标定方法  

Calibration Method for Optical Axis Perpendicular Error of Laser Sensor

作　　者：王祎雯[1] 付鲁华[1] 赵炎[1] 张恒[2] 曲兴华[1] 刘常杰[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]中国计量科学研究院,北京100013

出　　处：《中国激光》2017年第4期218-227,共10页Chinese Journal of Lasers

基　　金：国家重大科学仪器设备开发专项(2013YQ17053903)

摘　　要：针对高精度复合式测量机中的激光传感器进行了高精度的标定,提出了利用已知底角的双斜面标定块和正弦定理标定光轴垂直度误差偏角的方法,分析了影响标定精度的因素。该方法避免了传感器光轴与工作台不垂直引入的各个方向的误差,可有效地提高该传感器的测量精度,为更高精度的多传感器复合测量提供了基础。The high precision calibration of laser sensors in high-precision composite measuring machines is done. The calibration method of the optical axis perpendicular error angle by using the calibration block with double slopes with known base angles and the sine theorem is proposed. This method can avoid the errors from various directions caused by the non-perpendicular orientation between the optical axis of sensors and the worktable, which can effectively improve the measurement accuracy of this sensor and provide a basis for muhisensor duplex measurement with higher accuracy.

关 键 词：传感器 垂直度误差标定 拟合平面斜率 光轴 高精度复合式测量 

分 类 号：TH741[机械工程—光学工程]