电子束蒸发方法研究Mg2Si的薄膜及其光学带隙  

Preparation and optical bandgap of Mg_2Si film deposited by electron beam evaporation

作　　者：肖清泉[1,2,4] 房迪[2] 赵珂杰[3] 廖杨芳[2] 陈茜[2] 谢泉[2] 

机构地区：[1]安顺学院航空电子电气与信息网络贵州省高校工程技术研究中心,贵州安顺561000 [2]贵州大学大数据与信息工程学院新型光电子材料与技术研究所,贵州贵阳550025 [3]中国科学院北京分院科技合作处,北京100190 [4]格林威治大学计算力学与可靠性研究中心,伦敦SEIO9LS

出　　处：《红外与毫米波学报》2017年第2期202-207,共6页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(61264004);贵州省国际科技合作项目(黔科合外G字[2013]7003);贵州省自然科学基金(黔科合J字[2014]2052,[2013]2209);安顺学院航空电子电气与信息网络贵州省高校工程技术研究中心开放基金(HKDZ201403);贵州省科技厅贵州大学联合基金(黔科合LH字[2014]7610);贵阳市科技计划(筑科合同[2012101]2-16)~~

摘　　要：Mg_2Si材料作为一种新型环境友好半导体材料,其薄膜制备方法及其光学性质的研究对其应用研发起到基础性作用.采用电子束蒸发方法在Si(111)衬底上沉积Mg膜,在氩气环境下进行热处理以制备Mg_2Si半导体薄膜.采用X射线衍射仪(XRD)、扫描电镜(SEM)、分光光度计对制备的Mg_2Si薄膜进行表征.在氩气环境、温度500℃、压强200 Pa下,研究热处理时间(时间3-7 h)对Mg_2Si薄膜形成的影响.XRD和SEM结果表明:通过电子束蒸发沉积方法在500℃、热处理时间为3~7 h能够得到Mg_2Si薄膜.热处理温度是500时,最佳热处理时间是4 h,得到致密度好的薄膜.通过对薄膜的红外透射谱测试,得到了Mg_2Si薄膜的光学带隙,其间接光学带隙值为0.9433 eV,直接光学带隙值为1.1580 eV.实验数据为Mg_2Si薄膜的研发在制备工艺和光学性质方面提供参考.As an advanced ecological friendly semiconducting material, the researches on the preparation methods and optical properties of Mg2 Si film play a fundamental role in the applications and develop- ment of Mg2 Si films. Semiconducting Mg2 Si films were prepared by electron beam evaporation deposi- tion of Mg film onto Si （ 111 ） substrate and subsequent heat treatment under Ar gas atmosphere. X-ray diffraction （XRD）, scanning electron microscopy （SEM） and spectrometer were used to characterize and analyze the obtained Mg2Si films. Effects of heat treatment time （3 -7 h） at 500 ℃ under Ar gas pressure （200 Pa） on the formation of MgiSi films were investigated. The XRD and SEM results show that semiconducting MgESi films are obtained by electron beam evaporation deposition and subsequent heat treatment at 500 ℃ for 3-7 h. 4 h is optimal heat treatment time to prepare Mg2Si films when heat treated at 500 ℃, and the compact Mg2Si films are obtained. The calculational results of infrared trans- mittance spectra of the MgzSi films show that the indirect optical bandgap of the Mg2Si films is 0. 943 3 eV, and the direct optical bandgap is 1. 158 eV. These experimental data are beneficial to the device research and development of the Mg2 Si films in the preparation process and optical properties.

关 键 词：半导体薄膜 MG2SI 电子束蒸发 热处理 

分 类 号：O484.1[理学—固体物理]