光刻机多项式扫描运动轨迹规划算法  

Algorithm of Trajectory Planning for Polynomial scanning in Scanner Lithography

作　　者：张良[1] 秦祖军[1] 张志钢 张霖 

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004 [2]上海微电子装备(集团)股份有限公司精密运动工程部,上海201210

出　　处：《仪器仪表用户》2017年第6期24-27,共4页Instrumentation

基　　金：国家自然科学基金(61265005);广西自然科学基金项目(2013GXNSFDA019002);广西教育厅基金(ZD2014057)

摘　　要：针对于步进扫描投影光刻机提出了一种多项式扫描运动轨迹规划算法。为实现工程中特定的应用场景,在三阶扫描轨迹算法的基础上设计出多项式扫描运动轨迹规划算法。多项式扫描运动轨迹速度曲线段采用贝塞尔曲线原理实现。根据给定的动力学约束,以保证最大加速度与最大速度不超限且多项式运动轨迹加、减速段与速度曲线段位移、速度衔接要求,建立多项式扫描运动轨迹规划的约束基准。依据该基准,推导出多项式扫描运动加、减速段轨迹拐点公式。由三阶步进运动辅助完成轨迹位移衔接。最后仿真实验证明了该算法的可行性与合理性。A polynomial scanning trajectory planning algorithm is proposed for stepping scan projection lithography.In order to realize the specific application scene in the project, a polynomial scanning trajectory planning algorithm is designed on the basis of the third - order scanning trajectory algorithm.The velocity curve segment of polynomial scanning trajectory is realized by the Bezier curve principle.Based on system dynamic constraints, several criteria of polynomial scanning trajectory planning are constructed to ensure motion parameters planned within its preset values respectively and the continuity of trajectory. According to the criterion, the correlation equation is deduced.Displacement continuity is facilitated by third-order step motion.Finally, the simulation experiment proves the feasibility and rationality of the algorithm.

关 键 词：轨迹规划 多项式扫描运动 步进运动 贝塞尔曲线 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]