基于EI磁阻电机和直线音圈电机的混合控制  

Hybrid Control Based on EI Reluctance Actuator and Linear Voice Voil Actuator

作　　者：谢松[1] 张文涛[1] 张志钢 陈庆生 

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004 [2]上海微电子装备有限公司精密运动工程部,上海201203

出　　处：《仪器仪表用户》2017年第6期44-47,共4页Instrumentation

基　　金：国家自然科学基金(61265005);广西自然科学基金项目(2013GXNSFDA019002);广西教育厅基金(ZD2014057)

摘　　要：文章首先分析了目前直线音圈电机在微动运动台定位控制系统中应用的优缺点,在此基础上设计了一种EI磁阻电机和直线音圈电机的混合控制系统。该控制系统中选择EI磁阻电机作为前馈控制电机,音圈电机作为反馈控制电机。仿真实验验证了EI磁阻电机的小电流大推力特性,实现相同的加速度,EI磁阻电机所需电流仅是直线音圈电机的1/3左右。试验验证了该控制系统,与单使用音圈电机控制系统相比,伺服性能明显改善。此控制系统,对于实现下一代微动运动台的高加速高精度定位有很高的参考价值。In this paper, firstly we analyze the advantages and disadvantages of the application of the linear voice coil actuator in the position control system of the micro motion stage. Based on this, a hybrid control system of EI reluctance actuator and linear voice coil actuator is designed.In this control system, the EI reluctance actuator is chosen as the feed forward control actuator, and the voice coil actuator is used as feedback control actuator .The simulation results show that the small current and large thrust characteristics of the EI reluctance actuator, to achieve the same acceleration, the current of the EI reluctance actuator is only about 1/3 of the linear voice coil actuator＇ s. The experimental results show that the control system is significantly improved com- pared with the single voice coil actuator control system. This control system has a high reference value for the realization of high speed and high precision positioning of the next generation of micro motion stage.

关 键 词：混合控制 高加速 磁阻电机 音圈电机 定位系统 

分 类 号：TP301[自动化与计算机技术—计算机系统结构]