1064nm分振幅光偏振测量仪的多层介质分束镜的设计和制备  

Design and Preparation of Multilayer Dielectric Beam Splitter for Division-of-Amplitude Photopolarimeter at 1064nm

作　　者：袁文佳[1] 沈伟东[1] 章岳光[1] 郑晓雯[1] 沐雯 方波[1] 杨陈楹[1] 刘旭[1] 

机构地区：[1]浙江大学光电科学与工程学院现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光学学报》2017年第5期364-370,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61275161);国家863(2015AA015904);浙江省自然科学基金(LY13F050001);中国博士后科学基金资助项目(2016M601936);博士后创新人才支持计划(BX201600135)

摘　　要：设计和制备了一种用于1064nm分振幅光偏振测量仪(DOAP)的具有多层介质薄膜结构的差分相移分束镜。通过理论分析该DOAP系统的仪器矩阵参数,得到分束镜的最优参数,并用离子束溅射沉积方法制备了分束镜样品及其背面的减反射膜,其实测结果与设计值吻合较好。与单层薄膜分束镜相比,多层介质薄膜分束镜不受基板、膜层材料,以及入射角和工作波长的限制,具有更广泛的应用。A differential phase shift beam splitter with a multi-layer dielectric film structure which is used for a division-of-amplitude photopolarimeter （DOAP） with an operating wavelength of 1064 nm is designed and prepared. The optimal parameters of beam splitter are obtained by analyzing instrument matrix parameters of the DOAP system. The beam splitter sample and its anti-reflection coating on the backside are prepared with the ion beam sputtering （IBS） deposition method. The experimental results are well consistent with the designed value. Comparing with single-layer film beam splitters, this multilayer dielectric film beam splitters possess a wider application, which is not limited by the substrate, layer materials, incident angle, and operating wavelength.

关 键 词：薄膜 分束镜 相位延迟 偏振测量 多层介质膜 

分 类 号：O484.4[理学—固体物理]