Al-DLC薄膜结构及其在水介质下摩擦学性能研究  

Microstructure and Tribological Properties of Al-DLC Coatings in Water

作　　者：韩熙[1,2] 郑建云[1,3] 张帅拓 刘金玉[1,2] 郝俊英[1] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [2]中国科学院大学,北京100049 [3]青岛市资源化学与新材料研究中心,山东青岛266000

出　　处：《摩擦学学报》2017年第3期310-317,共8页Tribology

基　　金：国家重点基础研究发展规划项目(973)(2013CB632302);国家自然科学基金项目(51375471);青岛市自主创新计划(16-5-1-97-jch)资助~~

摘　　要：采用磁控溅射技术,以Al为溅射靶材,甲烷为溅射气体,在不同射频功率下制备了一系列Al含量不同的类金刚石碳基薄膜(AL-DLC).分析了Al含量对薄膜成分、结构及机械性能的影响,并探讨了其在空气和水介质下的摩擦磨损行为.结果表明:Al掺杂使得薄膜中sp^3-C的生长受到抑制,sp^2-C增加,表面吸附水分子能力变强,在水介质摩擦过程中的剪切阻力变小,从而使得摩擦磨损减小.通过调整射频功率可以对薄膜中Al含量进行调控,在最优Al含量时,Al-DLC在空气和水介质中均具有优异的摩擦学性能.A series of A1 doped diamond-like carbon films were deposited on N （100） Si substrates by radio frequency magnetron sputtering A1 target in methane atmosphere. The effects oral content on the composition, microstructure and mechanical properties of deposited films were investigated. The tribological properties of deposited films were investigated in air and water. The results indicate that the sp2-C in the films increased, while the sp3-C in the films was restrained with the increasing metal content. With the increase of the sp2-C, the tribological properties of the films in water were improved because of the enhanced surface graphitization. Meanwhile, the content of A1 of the films was adjusted by varying R.F power. Because of the appropriate AI content, the films exhibited excellent tribological performance both in water and air.

关 键 词：类金刚石薄膜 AL掺杂 sp3结构 水介质 

分 类 号：TH117.22[机械工程—机械设计及理论]