基于变速扫描技术的大尺寸台阶测量（英文）  

Measurement of large step structure with a speed-variable scanning technology

作　　者：雷李华[1] 李源[1] 蔡潇雨[1] 魏佳斯[1] 傅云霞[1] 邵力[1] 

机构地区：[1]上海市计量测试技术研究院,上海201203

出　　处：《红外与激光工程》2017年第7期200-207,共8页Infrared and Laser Engineering

基　　金：financially supported by national key scientific instrument and equipment development projects of China (2014YQ090709)~~

摘　　要：为了提高大尺寸台阶结构的单边测量精度、缩短测量时间,基于变速扫描技术,并利用傅里叶变换提取法及单边台阶评价算法进行扫描干涉信号的处理,提出并搭建了具有变速扫描功能的白光干涉测量系统。并且利用该系统对标称值为9.976±0.028μm的台阶标准样板进行了测量,10次重复性测量结果为9.971μm,标准偏差量为0.007μm,测量时间仅为35 s,远小于常规扫描方法的222 s,大大缩短了测量时间,因此说明了该系统在大尺寸台阶结构测量中,具有较高的精确性与高效性。A white light interference system was developed with a speed-variable scanning technology toimprove signal utilization precision and short measuring time for a large step structure measurement. AFourier transform and unilateral step evaluation algorithm were performed for processing the scanninginterference images. A calibrated standard step height of 9.976±0.028 ixm was measured by the whitelight interference system using the speed-variable scanning method, the measuring time was 35 s, whichwas much shorter than a conventional measuring time of 222 s. A 10-times-repetitive-measurementshows a result of 9.971 Ixm with a standard deviation of 0.007μm, illustrates that the system hasaccuracy and high-efficiency in the measurement of large step structure.

关 键 词：白光干涉 变速扫描 台阶标准样板 

分 类 号：TP274.5[自动化与计算机技术—检测技术与自动化装置]