基于MEMS技术的非接触式人体静电测量装置  

Non-contact Human Body Electrostatic Voltmeter Based on MEMS Technology

作　　者：闻小龙 彭春荣[1] 杨鹏飞[1,2] 陈博[1] 夏善红[1] 

机构地区：[1]中国科学院电子学研究所传感技术联合国家重点实验室,北京100190 [2]北京中科飞龙传感技术有限责任公司,北京100084

出　　处：《电子与信息学报》2017年第8期1835-1840,共6页Journal of Electronics & Information Technology

基　　金：国家自然科学基金(61302032;61327810)~~

摘　　要：为解决传统非接触式静电仪工作时振动或旋转部件裸露在外,无法在静电高危区域使用,难以测量运动人体带电情况等难题,该文研制出基于MEMS电场传感器的非接触式静电测量装置。提出一种新型检测电极与敏感芯片相连结构,显著增大了电场感应面积,增强了灵敏度。设计11个检测电极分布式布置形成门体结构,成功实现人体头、肩、臂、手、腿、脚部位在运动过程中带电情况的同时测量。基于金属仿真带电人体,提出模拟应用现场的标定方法,准确实现了静电安检门的标定。该静电测量装置具有无裸露可动部件、安全性高、环境适应性强等突出优点,满足粉尘浓度高、易燃油气浓度高等恶劣环境下的使用需求。试验结果表明,该装置测量范围为-30~30k V,分辨力优于50 V,总不确定度优于3%。The vibrating or rotating parts of the traditional non-contact voltmeters are exposed, thus they can not be used in high-risk areas, and can hardly measure moving bodies. To solve the above problems, this paper develops new non-contact voltmeters based on MEMS electric field sensors. A new detecting electrode, which connects to the sensor chip, is brought out and effectively enhances the sensitivity. Eleven electrodes are placed on a door frame, and measure the charge distribution of head, shoulder, arm, hand, leg and foot at the same time. By means of a metal human body model, a new calibration method for application is proposed. The voltmeter built in this paper is accurately calibrated. The voltmeters have significant advantages, such as no exposed moving components, safety, high environmental adaptability, and therefore can be used under high dust concentration, high concentration of flammable gas and other harsh environments. Test results show that the measurement range is -30-30 kV, the volt resolution is better than 50 V, and the uncertainty is better than 3%.

关 键 词：微机械电子系统 电场传感器 非接触 静电测量 静电仪 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] O441.5[自动化与计算机技术—控制科学与工程]