激光分光瞳共焦显微镜系统研制  

Development of laser divided-aperture confocal microscope

作　　者：胡谢琼 王允[1] 邱丽荣[1] 赵维谦[1] 张旭升[1] 朱恪[2] 

机构地区：[1]北京理工大学光电学院精密光电测试仪器及技术北京市重点实验室,北京100081 [2]中国科学院物理研究所,北京100190

出　　处：《光学技术》2017年第4期300-304,共5页Optical Technique

基　　金：国家自然科学基金(61475020;51535002;国家重大科学仪器设备开发专项任务(2011YQ04013607)

摘　　要：为了满足生物类等样品对大工作距和高分辨率共焦显微镜的需求,将分光瞳技术与激光共焦显微技术结合应用到成像系统上。阐述了激光分光瞳共焦显微成像原理,首次成功搭建了相应的显微镜成像测量系统。理论分析和实验表明:分光瞳共焦显微技术独特的非共轴结构使系统的轴向分辨力是相同数值孔径物镜单轴系统的3倍以上,对理论高度为100nm的台阶样品进行成像测试,得到的样品三维形貌,成像质量良好。To meet the demand for biological samples of confocal microscope with both large working distance and high-resolution,the divided-aperture technique and confocal microscopy are combined with applied to the imaging system.The optical path principle of laser divided-aperture confocal microscope（DACM）,corresponding characteristics,and the block diagram of the system are described.The corresponding measurement and imaging system of DACM successfully and firstly is built.Theoretical analyses and experimental results show that：DACM has unique non-coaxial structure,the axial resolution is three times more than the single-axis system in the use of the same numerical aperture of the objective lens.Imaging a step sample of the height of 100 nm,the result of the sample height is correctly and the quality of the image is favorable.

关 键 词：光学测量 分光瞳共焦技术 显微镜系统 成像 测量 分辨率 

分 类 号：TH742[机械工程—光学工程]