基于硅尖阵列的SF_6传感器制备及特性研究  

Fabrication and Properties of SF_6 Sensor Based on Silicon Tips Array

作　　者：李璐 张金英[2] 杨天辰 何秀丽[2] 陈硕 郑天祥 LI Lu ZHANG Jin-ying YANG Tian-chen HE Xiu-li(Global Energy Interconnection Research Institute, Beijing 102200, China State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China)

机构地区：[1]全球能源互联网研究院,北京102211 [2]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《仪表技术与传感器》2017年第7期15-19,共5页Instrument Technique and Sensor

摘　　要：针对电气设备中SF_6气体泄漏监测的需求,设计制备了基于硅尖阵列的SF_6传感器。完成了基于硅尖阵列的多针-板型负电晕放电气体传感器结构设计,主要包括硅尖阵列负电极、Au平板正电极、绝缘隔离层3部分。利用物理场有限元仿真软件COMSOL分析了针尖高度、针尖距离及电极间距对电场分布的影响,优化了器件结构参数。介绍了硅尖阵列负电极及Au平板正电极的MEMS工艺流程,完成了传感器的封装。搭建了测试系统,在不同湿度条件下测试了器件对0~100 ppm SF_6气体的响应。结果表明,设计制备的基于硅尖阵列的多针-板型电晕放电传感器可用于SF_6气体检测。SF6 sensor based on silicon tips array was designed and fabricated in order to meet the need of SF6 leak monito- ring.The sensor with multi-pin plate structure, including negative electrode of silicon tips array, positive electrode of Au plate and insulating layer, based on negative corona discharge was designed.The effects of the tip height, the tip distance and the electrode space on the electric field distribution were analyzed with software of COMSOL and the structure parameters were optimized. The fabrication processes of the negative electrode of silicon tips array, positive electrode of Au plate with micro-electromechanical system （MEMS） technology were introduced and the assemblage of the sensor was accomplished.The testing system was established and the sensing properties to SF6 with concentration range of 0- 100 ppm at different humidity were measured.The results show that the developed sensor with multi-pin plate structure based on silicon tips array and negative corona discharge technology can be used for SF6 detection.

关 键 词：硅尖阵列 多针-板 MEMS 负电晕放电 SF6传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]