平面光学元件微位移测量及仿真  

Research and Simulation of Micro-Displacement Measurement of Plane Optical Components

作　　者：弥谦[1] 赵昊天 MI qian ZHAO Haotian(School of Optoelectronic Engineering, Xi ＇ an Technological University, Xi ＇ an 710021, China)

机构地区：[1]西安工业大学光电工程学院,西安710021

出　　处：《西安工业大学学报》2017年第5期357-362,共6页Journal of Xi’an Technological University

基　　金：陕西省薄膜重点实验室项目(12JS046)

摘　　要：为了实现针对平面光学元件的微位移测量,提出了一种新型的基于消光式椭偏法的测量方法.通过对光线传播过程中椭圆偏振态的变化进行分析,推导出了在消光条件下,平面光学元件标准件与被测件之间的间距与起偏器方位角及检偏器方位角之间的函数关系,根据起偏器与检偏器方位角得出被测件相对标准件发生位移前后的间距,从而得出位移量的数值.仿真结果表明:入射角为60°,实验仪器测角精度为5′时,这种方法能够实现测量范围在250nm以内,测量精度为10nm的微位移测量.In order to realize the micro-displacement measurement of plane optical component,a new method based on ellipsometry applying light extinction method is proposed.The functional relationship of the spacing between standard component and measured component and the azimuth of polarizer and analyzer under the light extinction condition is derived,in accordance with analysing the conversion of elliptically polarized light＇s polarized state.The micro-displacement is calculated from the change of the polarizer＇s azimuth and the analyzer＇s azimuth.The simulating research shows that this method realizes the micro-displacement measurement in the range of 250 nm,and with the accuracy of 10 nm,under the condition that the incident angel is 60°,and the minimum requirement of instrument＇s angel measuring accuracy is 5′.

关 键 词：椭偏法 消光法 平面光学元件 微位移测量 

分 类 号：O436.3[机械工程—光学工程]