氧化锡气敏薄膜的喷墨打印技术研究  

Study OnI nk-Jet Printing Technology of Tin Oxide Gas Sensitive Film

作　　者：杨英花[1] 余隽[1] 吴昊[1] 李中洲[1] 唐祯安[1] 

机构地区：[1]大连理工大学电子科学与技术学院,集成电路技术辽宁省重点实验室,辽宁大连116024

出　　处：《传感技术学报》2017年第4期496-499,共4页Chinese Journal of Sensors and Actuators

基　　金：硅基纳米多级复合结构集成气体传感器项目(61131004);基于形变在线调控技术研究微热板气体传感器在应力作用下的稳定性和可靠性项目(61274076);中国工程物理研究院科学技术发展基项目(2012A0403018)

摘　　要：喷墨打印技术具有无需掩膜图形化、室温加工、方便操作等优点。利用喷墨打印技术在微热板上打印SnO_2多孔薄膜。根据打印机的定位精度和微热板的悬空尺寸设计了打印图形,根据目标厚度确定打印层数,以及打印后的干燥工艺参数;通过扫描电镜对薄膜结构进行微观表征,敏感薄膜表面平整,成膜均匀;最后对其进行气敏测试,当微热板工作在250℃时,打印的SnO_2气敏薄膜对乙醇有良好的响应,检测到最低乙醇浓度为0.5×10^(-6),响应和恢复时间均在3 s左右。Ink-jet printing technology works in the room temperature without mask graphical and operates conveniently.Ink-jet printing technology is used in the micro-hotplate gas sensor for printing SnO2 thin film.Printing pattern is designed according to the positioning precision of the printer and the suspended structure size of the MHP.The target thickness determined the numbers of printing layer and drying process parameters after printing are studied.The structure and characteristic of the SnO2 thin film on MHP are determined by scanning electron microscopy（SEM）.The sensitive thin-film surface is smooth and uniform.Furthermore,sensing properties of the sensor are investigated.The results show that at 250 ℃ the sensor is quite sensitive to ethanol,the lowest concentration of ethanol that could be detected is 0.5×10-6,and the response time and recovery time are both shorter than 3 seconds.

关 键 词：喷墨打印 气体传感器 微热板 气敏薄膜 

分 类 号：TN304.92[电子电信—物理电子学]