用于减少漂移的纳米定位干涉仪集成系统  

Interferometer and Nanometer Positioning Integration System Used for Drift Reduction

作　　者：吴健 林德教[1] 殷纯永[1] 郭继华[2] 

机构地区：[1]清华大学精密仪器与机械学系 [2]清华大学应用物理系,北京100084

出　　处：《中国激光》2002年第8期707-710,共4页Chinese Journal of Lasers

基　　金：国家自然科学基金 (No .5 9875 0 5 1);清华大学基础研究基金 (No .JC19990 4 7)资助项目

摘　　要：基于表面等离子体共振 (SPR)的纳米定位装置可以实现纳米级的定位分辨率和重复性。通过设计特殊四面体棱镜 ,使四面体棱镜第一个反射面的入射角等于SPR的共振角 ,在该反射面上镀上金属膜 ,后面放置光纤探头构成SPR定位指零装置 ,实现了纳米定位装置和干涉仪系统的集成。干涉仪测量前利用SPR纳米定位系统确定一个零位 ,当发生漂移时回到定位零点进行读数校正 ,就可以减少干涉仪的漂移误差。建立了集成纳米定位装置的干涉仪系统。实验表明 ,干涉仪的测量不确定度从 70nm减小到 10nm 。The positioning system based on surface plasmon resonance (SPR) can achieve nanometer resolution and repeatility. A special retroreflector is designed that incidence angle of its first reflection surface is equal to resonance angle of SPR. Then the surface is coated with gold film and a fibre probe is put behind the film to build up a SPR positioning system. The special retroreflector is component of SPR as well as the measurement mirror of interferometer to implement their integration. At the beginning of a measurement, a zero position is determined by SPR positioning system. If there is drift during measurement, reset interferometer data to diminish drift as soon as the special retroreflector reaches the zero position. The interferometer at nanometer positioning integration system is set up. Experiments show that uncertainty of interferometer is reduced from 70 nm to 10 nm. The measurement precision and stability of interferometer is increased.

关 键 词：漂移 干涉仪 纳米定位 表面等离子体共振 四面体棱镜 纳米测量 

分 类 号：TH744.3[机械工程—光学工程]