硅片真空传输平台前端真空室的研制  

Design of Vacuum Cassette Elevatorfor Wafer Vacuum Handling Platform

作　　者：李学威[1] 鲍君善[1] 路平[1] 何书龙[1] LI Xue-wei BAO Jun-shan LU Ping HE Shu-long(Shenyang Siasun Robot and Automation Co. , Ltd. , Shenyang 110168, China)

机构地区：[1]沈阳新松机器人自动化股份有限公司,沈阳110168

出　　处：《组合机床与自动化加工技术》2017年第9期122-124,128,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家科技重大专项02专项(2014ZX02103005)

摘　　要：文章设计并研制了8英寸硅片真空传输平台,介绍了该传输平台的整体结构,并对关键模块前端传输腔室VCE中的CTA传输手托盘系统进行了选型设计、机构分析。垂直升降系统采用丝杠传动,CTA传输手采用平面四连杆机构增大刚度。对传输手主动杆强度和变形量进行了有限元仿真分析。经过重复运行精度实验测试,整个平台达到了硅片制造要求。An 8 inches wafer transfer system is designed and developed in this paper. The structure of the system is introduced and the equipment selection and mechanism analysis are conducted to the CTA transfer tray system of the Vacuum Cassette Elevator which is the important model in the whole system. The vertical lift system adopts the screw drive,and the CTA transfer hand uses the plane four-bar linkage mechanism to increase the stiffness. The strength and deformation of the connecting rod is analyzed by the finite element simulation. Through the repeatability testing,the wafer transfer system can meet the demands of wafer production.

关 键 词：硅片 真空传输 有限元 

分 类 号：TH166[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]