硫化温度-时间曲线对铜锌锡硫薄膜性能的影响  

Effect of Sulfurization Temperature-time Curves on Properties of CZTS Thin Films

作　　者：李琦 蒋志[1] 杨剑[1] 杨敏[1] 陆熠磊 刘思佳[1] 徐信[1] 王书荣[1] 

机构地区：[1]云南师范大学太阳能研究所教育部可再生能源材料先进技术与制备重点实验室云南省农村能源重点工程实验室,昆明650500

出　　处：《人工晶体学报》2017年第9期1720-1727,共8页Journal of Synthetic Crystals

基　　金：西南地区可再生能源研究与开发协同创新中心(053002050516009);国家自然科学基金(61167003)

摘　　要：采用溅射法制备含硫预制层,硫化时采用不同的升温速率对经过合金处理的含硫预制层进行退火硫化。通过表征薄膜的表面粗糙度,致密性,均匀性来研究硫化时升温速率对薄膜表面形貌的影响。结果表明当升温速率变慢时,薄膜中的CZTS颗粒逐渐增大,虽然较大的颗粒能减少单位面积内的晶界,但是薄膜的表面粗糙度却随颗粒尺寸的增大而逐渐下降。通过对薄膜的元素组分、晶体结构、相成分进行了检测,确定出薄膜的成分为贫铜富锌的单相锌黄锡矿。再通过测量相应的没有Mo层的CZTS薄膜样品的光电特性来间接的反映拥有Mo层的CZTS薄膜的光电特性。最终制备出结构为SLG/Mo/CZTS/Cd S/i-Zn O/AZO/Ni/Al-grid的CZTS薄膜太阳电池,其中转换效率最高的电池为3.60%。The prepared sulfur-contained precursors based on sputtering method were sulfurized by different time-temperature profiles during the sulfurization process,and the effect of different timetemperature profiles on CZTS films were investigated by charactering roughness, compactness and homogenous of the CZTS surface. From the SEM results,the grain size of the CZTS gradually increase with slowing the heating rate. Although the large grain size can reduce the grain boundaries,the large grains deteriorate flatness of the CZTS surface. The phases of the film were determined by measuring the composition,crystallization and phase composition,it is indicate that the film is belong to Cu-poor and Zn-rich kesterite phase. The optical and electrical properties of the CZTS films were characterized by measuring the corresponding CZTS film samples without Mo layer. Finally,the CZTS cells with the SLG/Mo/CZTS/Cd S/i-Zn O/AZO/Ni/Al-grid structure were fabricated. And the best cell with the efficiency of3. 60% is obtained.

关 键 词：CZTS薄膜 太阳电池 磁控溅射 硫化 转换效率 

分 类 号：O484.1[理学—固体物理]