微半球谐振陀螺技术研究进展  

Research Development of Micro Hemispherical Resonator Gyro(μHRG) Technology

作　　者：汪红兵 林丙涛[1,2,3] 梅松 江黎 蒋春桥[1,2,3] Wang Hongbing Lin Bingtao Mei Song Jiang Li Jiang Chunqiao(The 26^th Research Institute, CETC, Chongqing 400060, China Solid Inertial Technology Enterprise Engineering Technology Research Center of Chongqing City, Chongqing 401332, China Solid Inertial Technology Engineering Laboratory of Chongqing City, Chongqing 401332, China)

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060 [2]重庆市固态惯性技术企业工程技术研究中心,重庆401332 [3]重庆市固态惯性技术工程实验室,重庆401332

出　　处：《微纳电子技术》2017年第11期772-780,共9页Micronanoelectronic Technology

基　　金：装备预研共用技术资助项目(41417010304)

摘　　要：首先介绍了微半球谐振陀螺(μHRG)基于驻波进动效应进行角度或角速度检测的工作原理。依据谐振子制作工艺的区别,将微半球谐振陀螺分为微玻璃吹制型、牺牲层型、精加工型三种,并对上述三种类型微半球谐振陀螺的加工工艺方案及特点、谐振子尺寸、陀螺或谐振子性能参数的国内外研究成果进行了详细阐述。简要对比分析了三种类型微半球谐振陀螺的优缺点,如潜在精度、体积、成本、与IC可集成性、批量化前景等,指出了微半球谐振陀螺目前面临的主要工艺技术问题,并针对此从工艺方案设计、工艺参数优化等方面提出了一些可能的技术解决途径。Firstly, the working principle for the angular measure or tachometric survey of micro hemispherical resonator gyros （μHRGs） is introduced based on the standing wave precession effect. According to the difference of processing technology, the μHRGs are divided into three types, i.e. micro-glassblowing type, sacrificial layer type and precision machining type. The do- mestic and foreign research results of the three types of the taHRGs are illustrated in detail, inclu- ding the machining process scheme and feature, resonator size, gyro or resonator performance pa- rameters. The advantages and disadvantages of the three types of the μHRGs are briefly com- pared and analyzed, such as accuracy, volume, cost, integration with ICs and batch production prospect. Several main process issues of the μHRGs are pointed out, and the possible technical solutions are presented from the aspects of the process scheme design and optimization of process parameters.

关 键 词：微半球谐振陀螺(μHRG) 玻璃吹制 牺牲层 精加工 Q值 各向同性刻蚀 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH703[机械工程—仪器科学与技术]