固结磨料研磨CVD金刚石膜的运动轨迹仿真及试验研究  

Motion simulation and experimental research of lapping CVD diamond film with fixed abrasive

作　　者：罗和平[1] 刘永吉[1] 何艳[2] 汲军[1] 苑泽伟[2] LUO He- ping;LIU Yong- ji;HE Yan;JI Jun;YUAN Ze- wei(Shenyang Machine Tool Co. , Ltd. , Shenyang 110142, China;Shenyang University of Technology, Department of Mechanical Engineering,Shenyang 110870, China)

机构地区：[1]沈阳机床股份有限公司,辽宁沈阳110142 [2]沈阳工业大学机械工程学院,辽宁沈阳110870

出　　处：《重型机械》2017年第6期42-45,共4页Heavy Machinery

基　　金："高档数控机床与基础制造装备"科技重大专项(No.2013ZX04001-031)

摘　　要：CVD金刚石膜的应用范围日益扩大,已经从传统的刀具、模具领域扩展至高频通讯、光电、微电子等产业。本文首先通过理论分析建立抛光盘与工件之间的运动模型,然后根据建立的模型确定工件运动轨迹方程,并使用Matlab进行了抛光试验的运动仿真,得出了最优的抛光转速组合;最后采用电镀金刚石盘进行抛光试验,采用光学显微镜对金刚石膜抛光前后的表面形貌进行分析,采用Talysurf分析抛光前后的表面粗糙度。With the expanding of the application scope of CVD diamond film, it has transformed from the tradi-tional fields of cutting tool to high frequency communications, optoelectronics, microelectronics industry, etc. In this paper, firstly, motion model is established between pads and artifacts by theoretical analysis and the traj-ectory equation of workpiece is determined, and then movement simulation of polishing experiment has been carried out by using Matlab. Finally, electroplated diamond was carried out for polishing experiment, and opti-cal microscope and Talysurf are used respectively for measuring surface morphology and surface roughness.

关 键 词：CVD金刚石膜 运动仿真 电镀金刚石盘 抛光 

分 类 号：TG321[金属学及工艺—金属压力加工]