直线电机原理及其在精密工作台中的应用  

The Principle of Liner Motor and Application in Precision Stage

作　　者：张乾[1] 谭立杰[1] 程秀全[1] 张永昌 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2017年第6期70-74,共5页Equipment for Electronic Products Manufacturing

摘　　要：激光划切机能在高速加工情况下切割LED晶圆获得干净的断裂面,形成窄而深的激光划切槽,要达到这样的工艺效果就要求激光划切工作平台同时具有较高的响应速度、准确的定位精度以及重复精度。首先对直线电机的原理进行研究,根据其外形特点不同进行分类,通过对比为精密工作台系统选择合适的直线电机类型,建立动力学数学模型,研究直线电机在精密工作台系统的应用。Laser cutting machine make cutting LED wafer to get clean fracture surface in the high-speed machining, and get laser cutting narrow and deep cracks, to achieve the effect of this process it requires the laser dicing working platform has the advantages of high speed, high precision, rapid positioning features. This paper first introduces the principle and structure, and selects the appropriate motor system. The linear motor features compared with the rotary motor. Linear motor mathematical model is established, which includes dynamic model, The application of linear motor in the system of precision working table is studied.

关 键 词：直线电机 动力学模型 精密工作台 激光划切机 

分 类 号：TM359.4[电气工程—电机]