单根锑掺杂ZnO微米线热电发电机的制备及热电性能  

Fabrication and Characteristics of Thermoelectric Microgenerators Based on Single Sb Doped ZnO Microwire

作　　者：冯秋菊[1] 石笑驰 邢研[1] 李芳[1] 李彤彤[1] 潘德柱 梁红伟[2] 

机构地区：[1]辽宁师范大学物理与电子技术学院,大连116029 [2]大连理工大学微电子学院,大连116024

出　　处：《无机化学学报》2018年第2期331-336,共6页Chinese Journal of Inorganic Chemistry

基　　金：国家自然科学基金(No.61574026;11405017);辽宁省自然科学基金(No.201602453)资助项目

摘　　要：采用化学气相沉积(CVD)方法,在无催化剂的条件下,生长出了锑掺杂的超长、大尺寸ZnO微米线。测试表明微米线的平均长度可达1~2.5 cm,微米线中锑元素的含量约为3.1%(n/n)。此外,将挑选出的单根锑掺杂ZnO微米线以银浆为电极制作成热电发电机,并研究了微米线长度和微米线直径对器件输出性能的影响。研究表明当器件两电极之间的温差为20 K且两电极间微米线的长度为1.6 cm时,器件能够输出的最大电压和最大输出功率分别约为36 m V和10.8 n W,微米线的赛贝克系数约为-1.80 m V·K-1。此外,热电器件的输出电压随着微米线长度的增加而增大,随微米线直径的增加而减小。Large-scale Sb doped ZnO microwire arrays were grown by chemical vapor deposition method without using metal catalyst. The experimental results show that the length of the microwires is about 1~2.5 cm and the Sb concentration in microwires is about 3.1%（n/n）. Moreover, thermoelectric generators were fabricated based on single Sb doped large-scale ZnO microwires. The influence of the length and diameter of microwires on the output characteristics of devices was investigated. Under a temperature difference of 20 K between two electrodes and the length of 1.6 cm, the devices can produce a maximum output voltage of about 36 mV, a maximum output power of about 10.8 nW. The single Sb-doped ZnO microwires show a Seebeck coefficient of about -1.80 mV·K-1. In addition, it is found that the output voltages of the thermoelectric device increase with the microwire length, and decrease with the microwire diameters.

关 键 词：化学气相沉积 锑掺杂 ZnO微米线 热电发电机 

分 类 号：O472.2[理学—半导体物理]