MEMS陀螺器件与驱动电路的相位关系研究  

Research of phase relationship between MEMS gyroscope and driving circuit

作　　者：陈华[1,2] 郭桂良 阎跃鹏[1] 来强涛[1] 韩荆宇[1] 

机构地区：[1]中国科学院微电子研究所,北京100029 [2]中国科学院大学,北京100049

出　　处：《现代电子技术》2018年第6期100-103,108,共5页Modern Electronics Technique

基　　金：国家自然科学基金资助项目(61234007)~~

摘　　要：为了指导高性能MEMS陀螺的驱动电路设计,针对MEMS陀螺器件与外围驱动电路之间存在的"激励电压、静电力、质量块位移、检测电容变化、检测电流、检测电压"五次信号转换进行了详细研究,获得了确切的相位关系,建立传输函数模型。最终根据推得的总体相位关系,设计并实现了一款基于锁相技术的闭环驱动电路。测试结果表明,MEMS陀螺系统能在3s内可靠起振且无振铃,稳定振荡频率为10.33 kHz,稳定振荡幅度为2.05 V。该测试结果验证了此相位关系研究的必要性与正确性,此研究同样适用于其他静电驱动、电容检测式MEMS传感器。To guide the drive circuit design of high-performance micro-electro-mechanical system(MEMS)gyroscope,five signal conversions of excitation voltage,electrostatic force,mass block displacement,detection capacitance variation,detection current,and detection voltage between MEMS gyroscope device and peripheral drive circuit are researched in detail to obtain specific phase relationships and built the transfer function model. A closed-loop drive circuit based on phaselock technique is designed and implemented. Test results show that start-up oscillation time of MEMS gyroscope system is less than 3 s without any ringing,stable oscillation frequency is 10.33 k Hz,and stable oscillation amplitude is 2.05 V. These results verify the necessity and correctness of phase relationship research,which can be also applied to other MEMS sensors based on electrostatic drive and capacitance detection.

关 键 词：MEMS传感器 MEMS陀螺 驱动电路 接口电路 相位关系 锁相环 

分 类 号：TN431.134[电子电信—微电子学与固体电子学] V241.5[航空宇航科学与技术—飞行器设计]