CMP设备抛光头高精度位置实时检测系统设计  

Design of high-precision position real-time detection system for CMP equipment

作　　者：薛超 魏昕[1] 谢小柱[1] XUE Chao;WEI Xin;XIE Xiaozhu(Faculty of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, CHN)

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《制造技术与机床》2018年第5期63-67,共5页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金项目(50805027);国家自然科学基金项目(5067503);广东省自然科学基金项目(S2013010014070);广州市科技计划项目(20160710156)资助

摘　　要：在化学机械抛光(CMP)过程中,抛光压力加载系统要求对抛光头的位置进行实时检测,以保证对抛光头行程进行精确的控制。为了满足这一要求,设计了基于ARM-Linux平台的CMP设备抛光头位置实时检测系统。该系统主要由ARM处理器、超声波测距模块、温度传感器DS18B20及抛光实验平台等组成。利用超声波测距原理,系统采集测距离、温度等信号,实现抛光头行程位置的检测。在ARM中移植Linux2.6操作系统,编写超声波模块、DS18B20传感器等驱动程序,上位机PC端采用QT设计实时显示界面。该系统实用性强、操作简单、测量精度高,解决了CMP设备抛光头位置检测的问题。In chemical mechanical polishing（ CMP） process,polishing pressure loading system require real-time detection,the location of the polishing head to guarantee precise control of polishing head trip. In order to meet this requirement,design the CMP equipment based on ARM-Linux platform polishing head position real-time detection system. The system is mainly composed of ARM processor,ultrasonic ranging module,temperature sensor DS18B20 and polishing experiment platform,etc. Gather distance measurement using the ultrasonic ranging principle,system,temperature signal,realize the polishing head stroke position detection. Transplant Linux2. 6 operating system in the ARM,write the ultrasonic module,sensor DS18B20 driver,PC using QT real-time display. The system is practical,simple operation,high measurement precision,solve the problem of the CMP polishing head position detection.

关 键 词：CMP设备 ARM 位置检测 驱动开发 超声波测距 实时显示 

分 类 号：TP271[自动化与计算机技术—检测技术与自动化装置]