空间用三结砷化镓太阳电池激光划片技术研究  

TECHNOLOGY RESEARCH ON LASER SCRIBING FOR SPACE TRIPLE-JUNCTION GaAs SOLAR CELL

作　　者：仇恒抗[1] 苏宝法[1] 池卫英[1] 陆剑峰[1] 贾巍[1] Hengkang;Su Baofa;Chi Weiying;Lu Jianfeng;Jia Wei(Shanghai Institute of Space Power-Sources, Shanghai 200245, Chin)

机构地区：[1]上海空间电源研究所

出　　处：《太阳能学报》2018年第5期1297-1301,共5页Acta Energiae Solaris Sinica

基　　金：上海市科学技术委员会资助项目(13ZR1457800)

摘　　要：以空间用三结砷化镓太阳电池激光划片为研究对象,对激光光源、功率、脉冲频率、划片速度等参数进行试验研究。研究结果表明：选用功率4 W、频率120 k Hz的355 nm紫外激光光源,采用50 mm/s的切割速度,对三结砷化镓太阳电池有良好的划片效果,切割宽度约14μm、深度约195μm,为激光切割技术用于三结砷化镓太阳电池的批量生产提供可能。Using laser scribing for space triple-junction Ga As solar cell as research object,some parameters of laserscribing were studied,including laser source,laser power,scribing rate,pulse frequency. The results showed that thelaser scribing is efficient for triple-junction Ga As solar cell,with using 4 W,120 kHz,355 nm ultraviolet source and 50 mm/s scribing rate. The cutting width and depth are about 14 μm and 195 μm respectively. The technology willprovide the possibility of mass production for triple-junction Ga As solar cell and engineering application.

关 键 词：三结砷化镓 太阳电池 激光划片 工程应用 

分 类 号：TM914.4[电气工程—电力电子与电力传动]