异质集成微波光子器件发展现状  

Development Status of Heterogeneous Integrated Microwave Photonics Devices

作　　者：王振[1] 廖柯[1] 瞿鹏飞[1] WANG Zhen;LIAO Ke;QU Pengfei(Chongqing Optoeleetronies Research Institute, Chongqing 400060, CH)

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2018年第3期305-311,共7页Semiconductor Optoelectronics

摘　　要：微波光子学利用光子技术实现微波信号的产生、传输、处理及控制,可突破传统微波技术在带宽、传输损耗和抗电磁干扰等方面的瓶颈,提升雷达、电子战等信息系统的综合性能。激光器、电光调制器和光电探测器是微波光子技术中的三种核心光电子器件,其性能对微波光子链路的噪声和动态等指标具有决定性的影响,但基于分立器件的微波光子系统体积、重量较大,难以满足雷达、电子战等系统的阵列化需求,硅基异质集成技术以及高密度低损耗片上光传输互连技术是解决有源器件集成和无源器件集成的关键技术。文章介绍了用于微波光子的硅基激光器、电光调制器、光电探测器和波导的异质集成技术的发展现状,并探讨了集成微波光子技术的发展趋势。Microwave photonics can overcome a series of bottlenecks of traditional technology such as low operating frequency,low bandwidth,high transmission loss and low ability of anti-electromagnetic interference by using photonic technology to generate,transfer process and control microwave and millimeter wave signals.Lasers,electro-optic modulators and photodetectors are the three key devices of microwave photonics,thus their performance affects a lot on such indexes as noise and dynamic range of microwave photonic links.However,large size and high weight of microwave photonic system based on discrete devices limit its array applications in radar and electronic warfare.Silicon-based hybrid integrated technique and highdensity and low-loss film on-chip optical transmission interconnection technique are the key technologies for solving the integration of active and passive devices.In this paper,the current developments of Si-based lasers,electro-optic modulators,photodetectors and waveguides are reviewed,and the development trends of integrated microwave photonics are discussed.

关 键 词：微波光子学 异质集成 激光器 电光调制器 光电探测器 波导 

分 类 号：TN256[电子电信—物理电子学]