无人飞行器电传操纵系统的MEMS加速度计零偏特性研究  

Research on zero bias characteristic of MEMS accelerometer in UAV-FBW

作　　者：钟伦超 王晓浩 钟磊 刘洋 尹君 鲁信琼 张秘[2] Zhong Lunchao;Wang Xiaohao;Zhong Lei;Liu Yang;Yin Jun;Lu Xinqiong;Zhang Mi(Research Center of Advanced Manufacture,Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055 ,China;Manufacturing Science and Engineering College,Southwest University of Science And Technology, Mianyang 621000,China)

机构地区：[1]清华大学深圳研究生院先进制造学部,深圳518055 [2]西南科技大学制造科学与工程学院,绵阳621000

出　　处：《电子测量技术》2018年第9期41-45,共5页Electronic Measurement Technology

摘　　要：零偏是研究MEMS加速度计的重要性能指标之一。通过对给定的加速度计进行大量实验得出其零偏的随机误差特性、温度特性、大过载环境下的变化规律,解算出MEMS加速度计的零偏、零偏稳定性、零偏重复性,得出该加速度计具有较好的稳定性能,为零偏补偿提供保障。建立零偏温度模型,在不同温度下进行零偏温度补偿实验,通过最小二乘法拟合得到MEMS加速度计的温度标度因数和温度零偏。实验结果表明,该补偿方法操作简便,能够有效补偿温度引起的MEMS加速度计测量误差,具有较强的工程使用价值。补偿后进行大过载环境下的实验研究,结果表明MEMS惯性器件重新稳定的时间在1-2s之间,大过载环境对MEMS惯性器件零偏影响很小,再次验证了该补偿方法的可行性。Zero-bias is one of the most important performance indexes of micro-electro-mechanical system（MEMS）accelerometer.Through a large number of experiments on a given accelerometer,the random error characteristics,temperature characteristics and the change law of the zero bias under the environment of large overload are obtained,and the zero bias,zero-bias stability and zero-bias repeatability of the MEMS accelerometer are calculated,and the accelerometer has good stability performance,and the zero-bias compensation is guaranteed.The zero-bias temperature model was established,and the zero-bias temperature compensation experiment was carried out at different temperatures.The temperature scale factor and temperature zero-bias of MEMS accelerometer were obtained by least square fitting.The experimental results show that the compensation method is easy to operate,which can effectively compensate the MEMS accelerometer measurement error caused by temperature,and has a strong engineering value.The experimental results show that the re-stabilization time of the MEMS inertial device is between 1 and 2 seconds,and the zero-bias of the MEMS inertial device is little affected by the large overload environment and the feasibility of the compensation method is verified again.

关 键 词：MEMS加速度计 机械零位 零偏 最小二乘法 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TN707[自动化与计算机技术—控制科学与工程]