基于金字塔结构的高灵敏滑触觉传感器研究  

Research on high sensitive slip-tactile sensor with pyramidal structure

作　　者：黄英[1] 孙志广 解志诚 毛磊东 HUANG Ying;SUN Zhi-guang;XIE Zhi-cheng;MAO Lei-dong(School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei 230009, Chin)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230009

出　　处：《传感器与微系统》2018年第6期18-21,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61471155)

摘　　要：为解决机器人皮肤及相关滑触觉传感器研究中存在量程较小、灵敏度较低的问题,提出了一种基于金字塔结构的滑触觉传感器。阐述了三维力检测和滑觉识别的工作原理;研究了滑触觉传感器的制备工艺;分析了在三维力作用下传感单元的电容值变化机理;综合采用改变极板正对面积、间距以及介质层的相对介电常数,以提高传感器在法向和剪切方向上的灵敏度;基于STM32微处理器和AD7147-1的阵列信息采集及处理系统,进行了静态特性试验。设计了用于机器人皮肤的传感阵列,进行了基于Lab VIEW的滑触觉传感器的感知实验,结果表明:滑触觉传感阵列可有效实现在较宽量程范围内灵敏、稳定的感知,可用于电子皮肤上实现三维力检测和滑觉感知的功能。A high sensitive slip-tactile sensor based on pyramidal structure is proposed in order to solve the problem of small range and low sensitivity existing in research of robot skin and correlated slip-tactile sensor. The working principle of detection of three-axial force and sliding recognition of sensor is stated. The fabrication process of the proposed sensor is studied; capacitance change mechanism is also analyzed. Combination change of the overlap area,distance between the upper electrode and the lower electrode,relative dielectric constant to improve the sensitivity of the sensor both in normal and shear directions. The static characteristic experiment is carried out based on array information acquisition and processing system of STM32 MCU and AD7147-1. Sensor array is designed for robotic skin,perception experiment of slip-tactile sensor based on the Lab VIEW is carried out. Results show that the slip-tactile sensor array can realize high sensitive and stable perception in wide range,which can be used in electronic skin to realize the detection of three-axial force and the function of slip sensing.

关 键 词：高灵敏 三维力 滑触觉传感器 电子皮肤 

分 类 号：TP212.6[自动化与计算机技术—检测技术与自动化装置]