微机械开放式射流陀螺设计和有限元分析  

Design and finite element analysis of micromechanical open fluidic gyroscope

作　　者：朴林华[1] 朴然 胡永辉 常兴远 PIAO Lin-hua;PIAO Ran;HU Yong-hui;CHANG Xing-yuan(Beijing Key Laboratory for Sensor, Beijing Information Science ＆ Technology University, Beijing 100101, China;High School Attached to Tsinghua University, Beijing 100084, China)

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101 [2]清华大学附属中学,北京100084

出　　处：《传感器与微系统》2018年第6期92-95,99,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60772012);北京市自然科学基金重点资助项目(KZ201511232034);北京市重点实验室开放课题资助项目;北京市新世纪百千万人才工程培养资助项目;现代测控技术教育部重点实验室资助项目

摘　　要：给出了一种基于开放式气流通道的Z轴微机械射流陀螺的设计和仿真。采用基于流固耦合的三维瞬态有限元分析方法,计算了敏感元件内部气流场。计算结果和测试表明:在压电陶瓷振子振动的一个完整周期内,射流敏感室内维持一个稳定的射流敏感体,为利用哥氏效应制作微机械开放式Z轴射流陀螺奠定了敏感基础;气流在压电泵的驱动下,由2个入口进入并汇聚,在喷口形成速度较大的射流敏感体后从出口流出,在入口和出口之间形成稳定的流动;满足预期响应频率的热线和喷口距离L_Z=1.8 mm,满足非线性度最小预期的两个平行热线之间的最佳距离Δl=0.7 mm;在静止条件下,热线r1和r2之间的速度梯度βX为零,随着角速度的输入,r1和r2之间的速度梯度βX不再为零,而随着角速度增加而加大;在±120°/s的输入范围内,陀螺灵敏度为SFz=2.0μV/((°)/s),非线性度优于0.5%,功耗为5.2 m W,热线电阻值R=3Ω,热线电阻温度系数TCR=2 600/℃。提出的有限元分析方法为微机械开放式Z轴陀螺的优化设计开辟了有效的研究途径。Design and simulation of Z-axis micromechanical fluidic gyroscope based on open gas flow channel is presented. The gas flow field inside the sensitive device is calculated by utilizing 3D transient finite element analysis based on fluid-solid coupling. The calculation results and test indicate that sensitive fluidic chamber maintains a stable sensitive fluid in a complete cycle of the piezoelectric vibrator,which establishes the sensitive foundation of the fabrication of a micromechanical open Z-axis fluidic gyroscope in using the Coriolis effect. Gas flow under the drive of piezoelectric pump,entering and conjugating from the two inlet,generates the high velocity sensitive fluid in the nozzle orifice. The stable flow is created in between inlet and outlet. Distance from the hotwires to the nozzle orifice that satisfies the expectation of response frequency at Lz= 1. 8 mm,and the optimal distance between two parallel lines is satisfied the minimum expectation of non-linearity with Δl = 0. 7 mm. Under the condition of static,velocity gradient between the hotwires r1 and r2 is zero. When angular rate is applied,velocity gradient between the hotwires r1 and r2 is not zero but enlarging with the angular increasing. Z-axis sensitivity of gyroscope is 2. 0 μV（（ °）/s）,a non-linearity is prior to 0. 5 %,power consumption is 5. 4 m W,hotwires resistance is 3 Ω and the temperature coefficient of hotwire resistance（ TCR） is 2 600/℃,in range of± 120°/s. The proposed method of finite element analysis open an effective study path for optimization design of micromechanical open Z-axis fluidic gyroscope development.

关 键 词：角速度 开放式气流通道 射流陀螺 有限元分析 热线 

分 类 号：TN37[电子电信—物理电子学]