一种低横向效应的压阻式加速度传感器设计  

Design of a Piezoresistive Accelerometer Sensor with Low Transverse Effect

作　　者：赵思晗 石云波[1] 赵永祺 孙亚楠[1] 任建军[1] 李飞 Zhao Sihan;Shi Yunbo;Zhao Yongqi;Sun Yanan;Ren Jianjun;Li Fei(Science and Technology on Electronic Test and Measurement Laboratoryi~ North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学电子测试技术重点实验室

出　　处：《微纳电子技术》2018年第8期577-582,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金青年科学基金资助项目(51705477)

摘　　要：为了提高传感器的测试精度、抑制传统传感器的横向效应问题,通过改变压阻排布方式设计了一种低横向效应的压阻式加速度传感器。该传感器采用8电阻十字梁结构,电阻全部对称排布在应力变化的线性区,使传感器在满足高灵敏度的同时消除了横向效应。通过有限元仿真分析得出该传感器的灵敏度为0.297 4μV/g,横向灵敏度为零,对封装后的传感器进行了Hopkinson杆冲击测试,横向灵敏度只占工作轴向灵敏度的1.1%,远小于相同结构尺寸下传统四电阻传感器的20.7%,而工作轴向灵敏度基本相同。实验表明,该传感器具有较高的工作轴向灵敏度和极低的横向灵敏度。In order to improve the testing accuracy of the sensor and suppress the transverse effect of the traditional sensor,apiezoresistive acceleration sensor with low transverse effect was designed by changing the arrangement of the piezoresistor.The sensor uses an eight-resistor cross beam structure,the symmetrical placement of the resistors in the variation linear region of the stress makes the sensor satisfy the high sensitivity and eliminate the transversal effect at the same time.The sensitivity and transverse-sensitivity of the sensor simulated by the finite element simulation and analysis are 0.297 4μV/gand 0,respectively.The shock test of Hoplinson rod for the packaged sensor was carried out.And the results show that the transverse-sensitivity is1.1% of the axial sensitivity,much smaller than 20.7% of the traditional four-resistor sensor in the same structure size,while they basically have the same working axial sensitivity.The experiment results show that the sensor has high working axial sensitivity and low transverse-sensitivity.

关 键 词：压阻式加速度传感器 横向效应 灵敏度 压阻排布 有限元仿真 HOPKINSON杆 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]