极紫外光刻机真空材料放气分率的单质谱测试方法研究  

Measurement Study on Materials' Partial Outgassing Rate for EUVL Vacuum System Based on Single Quadrupole Mass Spectrometer

作　　者：罗艳[1] 王魁波[1] 吴晓斌[1] LUO Yan;WANG Kui-bo;WU Xiao-bin(Academy of Opto-Electronics（AOE）,Chinese Academy of Sciences,Beijing 100094,China)

机构地区：[1]中国科学院光电研究院,北京100094

出　　处：《质谱学报》2018年第4期392-398,共7页Journal of Chinese Mass Spectrometry Society

基　　金：极紫外光刻机关键技术研究项目(2012ZX02702)资助

摘　　要：水蒸气(H_2O)和碳氢化合物(C_xH_y)的放气分率是评价极紫外光刻机(EUVL)真空材料的重要参数。研究材料放气分率的传统方法一般需要2个完全相同的四极质谱计,这不仅大大增加了测试设备造价,而且会导致测试结果存在误差。为解决这一问题,本文仅采用1个四极质谱计,设计了一种EUVL真空材料评价装置。采用该装置测试了碳纤维增强树脂基复合材料层压板(CFRP板)和玻璃陶瓷板(GC板)在不同时间的放气组分、总放气率和放气分率。结果表明,CFRP板放出大量的H_2O和C_xH_y;虽然C_xH_y放气分率比H_2O下降快,但经10h抽真空后,CFRP板仍可放出大量C_xH_y,且其总放气率高于经验阈值;GC板置于真空1h后就不再放出C_xH_y,且其总放气率低于经验阈值;因此GC板比CFRP板更适用于极紫外光刻机真空系统。基于单质谱的放气分率测试方法可用于指导极紫外光刻机真空材料的选择。In the prediction of vacuum performance of the ultraviolet lithography（EUVL）tool,making the right material choices for various parts of vacuum system means the difference between success and failure for the project as a whole.To meet the outgassing budget of the vacuum minienvironment in the material designing,outgassing behavior is an important evaluation criterion,including total outgassing rate,outgassing species and partial outgassing rate of water（H2 O）and hydrocarbons（CxHy）,for a certain amount of which will either absorb EUV light or contaminate optical mirrors.In order to have a comprehensive measurement,equipment containing single sample cham-ber,apumping system,apurging channel and a detecting set was established.In consideration of the cost reduction,test error lessening and practical engineering requirement,the orifice throughput method together with only one quadrupole mass spectrometer（QMS）was employed.Afterwards,the nitrogenous equivalent value of total and partial outgassing rates could be acquired,following the effective pumping rate and the partial pressure were calibrated at first through introducing nitrogen.With the purpose of verifying the correctness of the new principle and having a wise judgement,carbon fiber reinforced polymer（CFRP）laminates and glass ceramics（GC）were selected as detection objects,because they were the potential option to serve the circuit board.An outgassing experiment of different time was conducted on them using the above device to obtain their gas mass spectrums,partial and total outgassing rates.The results revealed that CFRP let out a lot of water and hydrocarbons and a mass of hydrocarbons were still released even after 10 hpumping in spite of that hydrocarbons＇ partial outgassing rate droped quicker than that of water.Besides,its total outgassing rate was beyond of the experiential threshold value.On the contrary,no hydrocarbon was given off after a period as short as 1 hpumping for GC sample,along with its total outgassing rate below th

关 键 词：极紫外光刻机(EUVL) 真空材料 放气分率 四极质谱计(QMS) 

分 类 号：TB74[一般工业技术—材料科学与工程] O657.63[一般工业技术—真空技术]