RF微谐振器研究进展  

Progress of Research on a New Generation Piezoelectric MEMS Microresonator Technology

作　　者：杨亮[1] 郑升灵[1] YANG Liang;ZHENG Sheng-ling(The 13th Research Institute,CETC,Shijiazhuang Hebei 050051)

机构地区：[1]中国电子科技集团公司第十三研究所十六专业部,河北石家庄050051

出　　处：《数字技术与应用》2018年第6期50-51,53,共3页Digital Technology & Application

摘　　要：基于MEMS工艺的Al N压电轮廓模式体波微谐振技术,结构和工艺类似FBAR,但具有频率范围更宽、更高的Q值、体积更小的特点。本文就对该微谐振器国内外发展现状、原理及结构特点、应用前景进行了综合性阐述,并对技术发展遇到的挑战性进行了分析。Al N piezoelectric contour-mode mode microresonator technology based on MEMS technics, its structure and process is similar to FBAR, but has advantages of wider frequency range, higher Q and smaller volume. In this paper, recent developments of this kind of microresonator at home and abroad are reviewed, the working principle, structure characteristic and application foreground are expatiated comprehensively, the challenges during technical development are analyzed.

关 键 词：压电 体声波 轮廓模式 MEMS微谐振器 

分 类 号：TP211[自动化与计算机技术—检测技术与自动化装置]