石英微机电陀螺的机械耦合误差研究  

Study on the Mechanical Coupling Error of Quartz MEMS Gyroscope

作　　者：林日乐[1] 李文蕴[1] 张桐 谢佳维[1] 蒋昭兴[1] 满欣[1] 江黎[1] LIN Rile;LI Wenyun;ZHANG Tong;XIE Jiawei;JIANG Zhaoxing;MAN Xin;JIANG Li(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,Chin)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2018年第4期526-528,共3页Piezoelectrics & Acoustooptics

摘　　要：石英微机电陀螺是一种利用科里奥利(Coriolis)效应的振动陀螺,工作时敏感芯片处于谐振状态,机械耦合误差是其主要误差源。分析了敏感芯片机械耦合误差因素,提出了驱动与检测模态解耦设计、振动隔离设计及轴对称质量平衡设计改进方案,实验结果表明,通过改进设计,有效抑制了敏感芯片机械耦合误差,提高了陀螺的精度及环境适应性。The quartz MEMS gyroscope is a kind of vibratory gyroscope that makes use of the Coriolis effect.The sensitive chip is in a resonance state during operation, and the mechanical coupling error is its main source of error.The error factors of the mechanical coupling of the sensitive chip are analyzed.The improvement schemes of the decoupling design of the driving and detecting modes,the vibration isolation design and the axisymmetric mass balance design are proposed.The experimental results show that by improving the design,the mechanical coupling error of the sensitive chip is effectively suppressed,and the precision and environmental adaptability of the gyro are improved.

关 键 词：石英 微机电陀螺 机械耦合误差 

分 类 号：TN37[电子电信—物理电子学] TM23[一般工业技术—材料科学与工程]