MEMS电容薄膜真空计微电容测量研究进展  

RECENT ADVANCES ON MEASUREMENT OF SMALL CAPACITANCE OF MEMS CAPACITANCE DIAPHRAGM GAUGES

作　　者：韩晓东 李得天[1] 成永军[1] 孙雯君[1] 李刚[1] 王呈祥 HAN Xiao-dong;LI De-tian;CHENG Yong-jun;SUNWen-jun;LI Gang;WANG Cheng-xiang(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2018年第3期145-150,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金重大科研仪器研制项目(61627805)

摘　　要：MEMS电容薄膜真空计的小型化和整体性能与微电容测量电路密切相关。由于不同领域的应用需求,MEMS电容薄膜真空规管具有不同的敏感电容结构,而相应的微电容测量法也不同。单侧电极微电容测量法电路结构简单,易于实现;双侧电极微电容测量法电路结构较复杂,但该电路可以减小寄生电容及温度的影响而获得高分辨率;静电力平衡式结构下微电容测量法用闭环电路,在高精度测量的同时还能拓宽真空计的动态范围。介绍了测量原理、电路结构及性能,可以看出,具有精度高、功耗低、易集成的特点,能够应用于多种不同类型的MEMS电容式传感器的微小电容测量电路,对今后MEMS应用从航空航天等高精尖领域向人工智能物联网领域的拓展具有重要意义。The miniaturization and overall performance of the MEMS capacitance diaphragm vacuum gauges is closelyrelated to the small capacitance measurement circuit. Due to the application requirements in different fields,the MEMS capacitancediaphragm vacuum gauges have different sensitive capacitance structures while the corresponding small capacitancemeasurement methods are also different. The structure of small capacitance measurement circuit for one-side electrodeis simple and the circuit is easy to implement. The structure of small capacitance measurement circuit for two-side electrodeis complex,but the circuit can reduce the influence of parasitic capacitance and temperature to obtain high resolution. In addition,the small capacitance measurement method for force balance type structure uses closed loop circuit,this method can realizehigh precision and expand the dynamic range of vacuum gauges at the same time. It can be seen from the above that thehigh-precision,low power consumed and easily integrated small capacitance measurement circuit that can be applied to varioustypes of MEMS capacitance sensors is of great significance for the future application of MEMS sensors from the aerospaceand other sophisticated fields to the fields of artificial intelligence and the Internet of Things.

关 键 词：MEMS 真空计 微电容 测量电路 

分 类 号：TB771[一般工业技术—真空技术]