激光焦点控制磁力驱动的控制特性实验对比分析  

Experimental comparative analysis of control characteristics of laser focus control magnetic force drive

作　　者：佟玲[1] 吴利平[1] 金嘉琦[1] 孙凤[1] 张晓友 TONG Ling;WU Liping;}IN Jiaqi;SUN Feng;ZHANG Xiaoyou(School of Mechanical Engineering,Shenyang University of Technology,Shenyang 110870,China;Nippon Institute of Technology,Saitama 345-0826,Japan)

机构地区：[1]沈阳工业大学机械工程学院,辽宁沈阳110870 [2]日本工业大学

出　　处：《国防科技大学学报》2018年第3期120-126,共7页Journal of National University of Defense Technology

基　　金：国家自然科学基金资助项目(51105257;51310105025)

摘　　要：为了满足激光焦点控制系统的位置和速度响应要求,设计了一种轴向放置、轴向磁化的环形永磁体自复位的3自由度激光焦点磁力驱动微动平台。根据该微动平台的结构进行力学分析并建立动力学方程,在此基础上进行微动平台的比例、积分、微分控制实验和鲁棒控制实验。通过两种不同控制策略的对比分析,结果表明,两种控制策略都能实现微动平台的稳定驱动,但是在比例、积分、微分控制策略下,响应速度更好,在鲁棒控制策略下,抗干扰能力更好。In order to satisfy the requirements of position and velocity response of the laser focus conterol system, a three-degree-of freedom laser focus magnetically driven micro-motion platformwas designed. According to the structure of the freestyle platform, the mechanical analysis and the establishment of the kinetic equation were carried out.On this basis, the PID（proportion integration differentiation） control experiment of the fretting platform were carried out. Results show that the tmicro-motion platform. However,under the PID control strategy,the response speed is better;while under the robust control strateg, the antijamming ability is better.

关 键 词：电磁驱动 鲁棒控制 比例、积分、微分控制 对比实验 差动控制 

分 类 号：TH-39[机械工程]