基于遗传算法的PID控制在IC芯片烘箱中的应用  

Design of a PID Controller of IC Oven on Genetic Algorithm

作　　者：梁达平[1] 赵利民[1] 蔡志元 LIANG Daping;ZHAO Limin;CAI Zhiyuan(School of Electronic Information and Electrical Engineering;Tianshui Normal University,Tianshui 741000,Chin;2.Tianshui Huatian Technology Co.,Ltd.,Tianshui 741000,China)

机构地区：[1]天水师范学院电信与电气工程学院,甘肃天水741000 [2]天水华天科技股份有限公司,甘肃天水741000

出　　处：《电子与封装》2018年第11期9-14,共6页Electronics & Packaging

基　　金：甘肃省高等学校科研项目(2017B-72)

摘　　要：针对IC (集成电路)芯片烘箱在温度控制中因腔体均匀性差导致调节效率低的问题,在烘箱温度控制程序中引入了对初始条件不敏感、能够寻求全局最优解的自适应在线遗传算法PID控制策略。通过对改进前后两种设备的算法模型进行实测数据对比分析,证明采用遗传PID控制方案的设备性能要远优于采用传统PID方案的设备,其温度调节速率明显提高,并具有良好的动态特性和鲁棒性。The poor uniformity is the key problem to keep IC oven high efficiency. An optimal genetic control algorithm is used in new advanced IC oven, which is not sensitive to oven＇s initial condition, could find globally optimal solution, and has strong adaptability. The result of experiment data indicates that the new method could improve speed regulation of temperature, reduce settling time and overshoot, and the new control algorithm has better interference suppression and robustness than regular algorithm.

关 键 词：温度控制 遗传算法 IC封装 IC芯片烘箱 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]