碲锌镉晶体表面磨抛方法研究  

Study of Surface Lapping and Polishing Methods of Cadmium Zinc Telluride

作　　者：程雨 李春领[1] 肖钰[1] CHENG Yu;LI Chun-ling;XIAO Yu(North China Institute of Photoelectric Technology,Beijing 100015,China)

机构地区：[1]华北光电技术研究所,北京100015

出　　处：《红外》2018年第11期11-16,共6页Infrared

摘　　要：碲锌镉是一种性能优异的Ⅱ-Ⅵ族化合物半导体材料。随锌含量不同,其禁带宽度可连续调节,是用于制备红外探测器的碲镉汞材料的优良衬底。介绍了多种碲锌镉晶体的磨抛方法,包括手工研磨、机械抛光、化学抛光和机械化学抛光。借助多种表征技术和改良手段,碲锌镉晶体的表面加工取得了显著进步。Cadmium Zinc Telluride （CZT） is a II-VI compound semiconductor material with excellent performance. Its energy gap can be tuned continuously with different zinc content. So it is an excellent substrate material for the HgCdTe material to be used to manufacture infrared detectors. Several lapping and polishing methods of cadmium zinc telluride including hand lapping, mechanical polishing, chemical polishing, mechanochemical polishing are presented. With the aid of various characterization techniques and reformed methods, significant progresses have been made in the surface processing of CZT.

关 键 词：碲锌镉 磨抛 机械化学抛光 精密加工 

分 类 号：TN304.2[电子电信—物理电子学]