LTCC基板材料耐酸蚀性能研究  

Corrosion resistance of different substrates for low temperature co-fired ceramic

作　　者：万欢欢 张为军[1] 刘卓峰[1] 陈兴宇[1] 汪丰麟 WAN Huanhuan;ZHANG Weijun;LIU Zhuofeng;CHEN Xingyu;WANG Fenglin(College of Aerospace and Engineering,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]国防科技大学空天科学学院,湖南长沙410073

出　　处：《电子元件与材料》2018年第11期61-66,共6页Electronic Components And Materials

摘　　要：为适应化学镀工艺实现低成本制备,LTCC基板材料要求具备一定的耐酸性镀液腐蚀能力。本文研究了CaO-B_2O_3-SiO_2、BaO-Al_2O_3-SiO_2/Al_2O_3、硼硅酸盐玻璃/锂辉石/Al_2O_3、硼硅酸盐玻璃/堇青石/Al_2O_3四种LTCC基板材料在HNO_3、HCl和H_2SO_4溶液中的耐酸蚀性能。采用XRD、EDS、SEM、ICP等技术分析了腐蚀后基板的形貌和成分。结果显示基板在强酸溶液的腐蚀下均出现不同程度的孔洞缺陷,腐蚀程度随H^+浓度的升高而升高。酸根离子种类对基板的腐蚀影响不大。腐蚀机理主要是基板材料的主晶相与H^+的化学反应导致的成分溶蚀。钡长石、硅灰石与H^+反应,因此CaO-B_2O_3-SiO_2、BaO-Al_2O_3-SiO_2/Al_2O_3耐腐蚀性能较差;而锂辉石、Al_2O_3不与酸发生反应,硼硅酸盐玻璃/锂辉石/Al_2O_3、硼硅酸盐玻璃/堇青石/Al_2O_3耐腐蚀性能较好。The substrate for low temperature co-fired ceramic （LTCC） requires certain durability in acid solution to reduce thecost in the electroless plating process. In this work, the durability of four types of LTCC substrate： CaO-B2O3 -SiO2 , BaO-Al2O-SiO2 / Al2O3 , borosilicate glass / spodumene / Al2O3 and borosilicate glass / cordierite / Al2O3 , were explored in aqueous solutionscontaining HNO3 , HCl and H2SO4 . Various characterization techniques, including XRD, EDS, SEM and ICP, were used forinvestigation of the morphology and chemical composition of the substrates. The results show that the chemical etching proceduregenerates different degree of porosity in these LTCC substrates. As the H＋concentration is increased, the porosification increases whilethe acid radical ions has little influence on the results. The etching mechanism is the chemical reaction of the substrate with H＋, whichdissolve some crystal phase of the substrate. Celsian and wollastonite are the predominantly reaction phase. As a result, the CaO-B2O3 -SiO2 and BaO-Al2O3 -SiO2 / Al2O3 substrates display poor corrosion resistance, while the orosilicate glass / spodumene / Al2O3and borosilicate glass / cordierite / Al2O3 substrates show better durability in acid solutions.

关 键 词：低温共烧陶瓷 基板 微晶玻璃 陶瓷 化学镀 腐蚀 

分 类 号：TM215.7[一般工业技术—材料科学与工程]