甲醇在热阴极DC-PCVD方法制备金刚石膜过程中的作用  

Influence of Methanol Addition on Diamond Films Deposition with Hot Cathode DC-PCVD Method

作　　者：姜志刚[1] 金曾孙[1] 白亦真[1] 曹培江[1] 张露[1] 杨广亮[1] 李俊杰[1] 吕宪义[1] 

机构地区：[1]吉林大学超硬材料国家重点实验室,长春130023

出　　处：《高等学校化学学报》2002年第9期1648-1650,共3页Chemical Journal of Chinese Universities

基　　金：教育部优秀中青年项目;吉林省科学技术委员会计划发展基金 (批准号 :980 5 44 )资助

摘　　要：采用热阴极 DC-PCVD方法制备了金刚石膜 ,研究了甲醇对放电状态和金刚石膜生长特性的影响 .结果表明 ,通入适量的甲醇有利于稳定辉光放电状态 ,保持阴极清洁 ,提高膜的生长质量 .Diamond films were deposited with hot cathode DC\|PCVD method in this paper. The methanol addition influences on discharge state and diamond film growth characteristics were studied. The research results show that a proper amount of methanol addition is beneficial to the stability of glow discharge. It can keep the cathode surface clean and improve the film quality. The growth characteristics of diamond films are analyzed by means of SEM and Raman spectroscopy.

关 键 词：热阴极DC-PCVD 甲醇 辉光放电 金刚石膜 生长特性 直流等离子体沉积 

分 类 号：O484[理学—固体物理] O613.71[理学—物理]