1034探针台平面电机功放部件的维修  

Maintenance of Power Amplifier Unit in Planar Motor of 1034 Wafer Probing Station

作　　者：陈国芳[1] 武乾文[1] 

机构地区：[1]无锡微电子科研中心,无锡214035

出　　处：《微电子技术》2002年第5期43-45,64,共4页Microelectronic Technology

摘　　要：在1034探针台中,驱动承片台在X-Y方向运动的平面电机功率放大部件是该设备的核心部件,其性能的好坏直接关系到探针台的性能。本文拟从简述平面电机的原理入手,对该功放部件的性能、测试方法和维修作一讨论。For the 1034 wafer probing station the power amplifier unit in the planar motor driving the wafer carrier to move in X and Y direction is a key unit. Its performance directly influences upon the function of the wafer probing station. Beginning with a brief introduction to the principle of the planar motor, the performance, test, and maintenance are discussed in the paper.

关 键 词：1034探针台 平面电机 功放部件 维修 承片台 封装 半导体 

分 类 号：TN305[电子电信—物理电子学]