多晶体薄膜生长中的织构诱导与控制  

Texture Induction and Control during Growth of Polycrystalline Thin Films

作　　者：刘艳辉[1] 张秀娟[1] 孟亮 

机构地区：[1]浙江大学金属材料研究所,杭州310027

出　　处：《材料导报》2002年第10期28-30,共3页Materials Reports

基　　金：国家自然科学基金(批准号:50071056)

摘　　要：综述了多晶体薄膜材料织构的诱导和控制方法、影响薄膜结晶过程中晶体取向的因素及不同生长条件下形成晶体择优取向的原因。讨论了目前多晶体薄膜织构控制研究中存在的问题和发展方向。Latest results of research on the methods of texture induction and control during crystal growth of polycrystalline thin films are reviewed.The mechanisms responsible for the formation of preferred orientation and the effects of preparation techniques on the crystalline orientation are analyzed.Moreover,some problems and trends are exaimed in the current research on the texture induction and control during crystal growth of polycrystalline thin films.

关 键 词：薄膜生长 织构 诱导 控制 晶体生长 

分 类 号：TB34[一般工业技术—材料科学与工程] TB383