KCl透镜上的类金刚石碳膜红外透射特性研究  

INFRARED TRANSMISSION CHARACTERIZATION OF DIAMOND-LIKE CARBON FILMS ON KCl LENS

作　　者：姚合宝[1] 贺庆丽[1] 徐蓉[1] 于明湘[1] 

机构地区：[1]西北大学物理系,西安710069

出　　处：《光子学报》2002年第9期1132-1134,共3页Acta Photonica Sinica

摘　　要：用射频—直流辉光放电PECVD法在KCl透镜上沉积了非晶结构的类金刚石碳膜 测量显示镀覆了类金刚碳膜的KCl透镜在 2 .5 μm～ 5 0 μm红外范围内具有高增透作用Amorphous diamond like carbon films on KCl lens were prepared with rf cd PECVD method. The measurement shows that the lens with the films has a high transmission in the infrared range between 2.5μm～50μm. The infrared spectrum anlysis shows that the SP 3 bond is the main bonding.

关 键 词：KCl透镜 等离子体 类金刚石碳膜 红外透射谱 氯化钾透镜 红外保护 

分 类 号：O484.41[理学—固体物理] TH74[理学—物理]