多功能键合仪研制及在教学中的应用  

Development of multifunctional bonding instrument and its application in teaching

作　　者：王蔚[1] 封迪 田丽[1] Wang Wei;Feng Di;Tian Li(School of Astronautics, Harbin Institute of Technology, Harbin 150001, China)

机构地区：[1]哈尔滨工业大学航天学院,黑龙江哈尔滨150001

出　　处：《实验技术与管理》2017年第11期35-38,90,共5页Experimental Technology and Management

基　　金：黑龙江省自然科学基金项目(E200917);哈尔滨工业大学教学实验室建设项目

摘　　要：对硅/玻璃阳极键合进行了实验技术研究,阐述了实验设计思路;确定了实验的内容和方法,据此研制出能直观显示硅/玻璃界面键合情况以及键合电流-时间曲线的多功能键合实验仪。通过键合操作、现象观察和深入分析,使学生更加深入了解键合机理、掌握影响键合效果与效率的主要因素。该实验技术有助于提升学生的动手能力、分析能力以及综合素质。The research on experimental technology for the silicon and glass anodic bonding is carried out,the design idea of the experiment is expounded,and the content and method of the experiment are determined.Based on this,a multifunctional bonding experimental instrument which can directly display the silicon and glass interface bonding and the bonding currenttime curve is developed.Through the bonding operation,phenomenon observation and indepth analysis,students can better understand the bonding mechanism and master the main factors that influence the bonding effect and efficiency ratio.This experimental technology is helpful to improve students’handson ability,analytical ability and comprehensive quality.

关 键 词：阳极键合 教学实验 键合仪 电流监测 

分 类 号：TN405[电子电信—微电子学与固体电子学]