基于激励-校准法的硅微陀螺仪模态匹配控制电路研究  

Research on Mode-Matching Control Circuit for Micromechanical Silicon Gyroscope Based on Excitation-Calibration Alibration Technology

作　　者：吴磊[1,2] 杨波[1,2] 王刚[3] WU Lei;YANG Bo;WANG Gang(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,Ministry of Education,Southeast University,Nanjing 210096,China;Aviation Key Laboratory of Science and Technology on Inertia,FACRI,Xi’an 710065,China)

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,南京210096 [3]惯性技术航空科技重点实验室,中航工业自控所,西安710065

出　　处：《传感技术学报》2018年第3期363-367,共5页Chinese Journal of Sensors and Actuators

基　　金：航空科学基金项目(20150869005)

摘　　要：提出了一种基于激励-校准法的硅微陀螺仪实时模态匹配控制电路,利用了检测模态的幅度响应信号关于其谐振频率对称的特点,采用双边激励信号激励检测模态,通过比较双边信号的响应幅度大小来获得相应的调谐电压,实现模态匹配。介绍了静电负刚度调谐原理;然后设计了基于激励-校准法的硅微陀螺仪实时模态匹配控制方案,并分析了该法的误差来源;在Simulink环境下搭建了模态匹配控制电路模型,验证了该方案的可行性;最后,设计了基于FPGA的自动模态匹配控制电路。实验结果表明,相比于模态不匹配情况,模态匹配后的陀螺仪零偏稳定性系数由1.69°/h降低到0.42°/h,静态性能提升了4.02倍;角度随机游走系数由槡0.046°/h降低到槡0.019 5°/h,静态性能提升了2.36倍。A real-time mode-matching control circuit for micromechanical silicon gyroscope based on excitation-calibration method is presented in this paper.The symmetry characteristic of sense mode response is exploited by injecting excitation signals mixed with two pilot tones having specific frequencies into sense mode.The tuning voltage is acquired by calculating the amplitude difference between two response signals of pilot tones.The principle of frequency tuning technology based on electrostatic negative stiffness is reported at first.Then,the proposed mode-matching method is presented and the introduced tuning error is analyzed.The mode-matching model built in Simulink verifies the feasibility of the proposed frequency tuning technology.The automatic mode-matching control circuit is designed based on FPGA.Experimental results indicate that zero bias stability decreases from 1.69/h to 0.42/h and the static performance is improved by 4.02 times.Angular random walk decreases from 0.046/h to0.0195/h and the static performance is improved by 2.36 times.

关 键 词：硅微陀螺仪 模态匹配 激励-校准 静电负刚度 零偏 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]