多自由度运动误差在线测量系统设计  

Design of multi-DOF motion error online measurement system

作　　者：杨博[1] YANG Bo(Zhoukou Normal University,Zhoukou 466000,China)

机构地区：[1]周口师范学院,河南周口466000

出　　处：《现代电子技术》2018年第8期22-25,共4页Modern Electronics Technique

基　　金：国家自然科学基金(21171179)~~

摘　　要：针对传统多自由度运动误差测量系统一直存在易受工作环境影响,误差测量稳定性差的问题,提出并设计基于激光干涉仪的多自由度运动误差在线测量系统。通过分析激光干涉仪误差测量原理,在传统运动误差测量系统中引入激光干涉仪,利用激光干涉现象对多自由度运动物体精确测定,建立多自由度运动误差在线测量数学模型,实现多自由度运动误差的测量。实验结果表明,相比传统测量系统,改进设计的多自由度运动误差在线测量系统,具有良好的抗干扰能力及较高的测量准确性。In allusion to the problem that the traditional multi degree of freedom(multi-DOF)motion error measurement system is prone to the impact of work environment,and has poor error measurement stability,a multi-DOF motion error online measurement system based on laser interferometer is proposed and designed.Laser interferometer is introduced in the traditional motion error measurement system by analyzing the error measurement principle of laser interferometer.Accurate measurement of multi-DOF moving objects is performed by means of laser interference phenomenon.The multi-DOF motion error online measure-ment mathematical model is built to realize multi-DOF motion error measurement.The experimental results show that in compari-son with the traditional measurement system,the improved multi-DOF motion error online measurement system has better anti-in-terference ability and higher measurement accuracy.

关 键 词：激光干涉仪 多自由度 运动误差 测量稳定性 在线测量 系统设计 

分 类 号：TN98-34[电子电信—信息与通信工程] TN913