基于微小型稳定平台的MEMS陀螺信号调理电路设计与测试  

Design and Test of MEMS Gyro Signal Conditioning Circuit Based on Micro Stable Platform

作　　者：蒋孝勇 李锡广[1] 安永泉[3] 唐军 李孟委[1,2] JIANG Xiaoyong;LI Xiguang;AN Yongquan;TANG Jun;Li Mengwei(Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China;School of Instrument and Communication Engineering,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学电子测试技术国家级重点实验室,太原030051 [2]中北大学仪器与电子学院,太原030051 [3]中北大学信息与通信工程学院,太原030051

出　　处：《电子器件》2018年第2期351-355,共5页Chinese Journal of Electron Devices

基　　金：武器装备预研基金项目(9140A20040515BQ04283);武器装备预研基金项目(9140A17060115BQ04241)

摘　　要：为提高MEMS陀螺的使用精度,基于微小型稳定平台应用背景设计了高精度MEMS陀螺信号调理电路,实验表明该电路提升了陀螺仪的使用精度。设计的调理电路采用高速24位Δ-Σ型A/D转换电路和高精度差分放大器对陀螺信号进行处理。基于MEMS陀螺仪搭建了两轴陀螺组件,并将两轴陀螺组件安装于高精度三轴转台,进行测试。采集MEMS陀螺模拟输出和数字输出数据,分别进行Allan方差分析。结果表明:该调理电路使X轴MEMS陀螺零偏不稳定性指标提升13.63%,Y轴MEMS陀螺零偏不稳定性指标提升19.347%。In order to improve the accuracy of the MEMS gyroscope,based on the application background of the micro stable platform,a high precision MEMS gyro signal conditioning circuit is designed.Conditioning circuit which is designed using a high-speed 24 bit delta sigma type A/D conversion circuit and high precision differential amplifier.The axis gyro component which was built with two CRG20 gyroscopes is tested with three axes turntable.CRG20 gyro analogue output and digital output data are collected and analyzed by Allan variance analysis.The results show that the zero bias instability index of the X axis gyro is improved by 13.63%,and the zero bias instability of the Y axis CRG20 gyro is improved by 19.347%.

关 键 词：MEMS陀螺 信号调理电路 零偏不稳定性 ALLAN方差 

分 类 号：U666.1[交通运输工程—船舶及航道工程]