退火气氛对ZnO∶Fe薄膜微结构和铁磁性能的影响  

Effects of annealing atmosphere on microstructure and ferromagnetism of ZnO∶Fe thin films

作　　者：更藏多杰 才让措[1] 陈万军[1] 张国恒[1] 陈琼[1] 安秀加 GENGZANG Duojie;CAI Rangcuo;CHEN Wanjun;ZHANG Guoheng;CHEN Qiong;AN Xiujia(Key Laboratory for Electronic Materials of the State Ethnic Affairs Commission,Electrical Engineering College,Northwest Minzu University,Lanzhou 730030,China)

机构地区：[1]西北民族大学电气工程学院,电子材料国家民委重点实验室,兰州730030

出　　处：《功能材料》2018年第4期4089-4093,共5页Journal of Functional Materials

基　　金：中央高校基金资助项目(31920150011,1001860405);甘肃省重点研发计划资助项目(17YF1GA025);甘肃省自然科学基金资助项目(1606RJZA064)

摘　　要：采用射频磁控溅射法在Si衬底上制备了Fe掺杂ZnO纳米薄膜,并在真空和空气中对其进行热处理,利用X射线衍射(XRD)、扫描电子显微(SEM)、对其微结构、表面和断面形貌进行测试。结果表明,样品均呈现六角纤锌矿结构,薄膜沿c轴方向择优生长,发现退火气氛对薄膜的微结构有一定影响,当空气中退火时,出现了最强的(002)衍射峰,晶粒变为最大,薄膜的结晶度和取向性都明显变好。利用振动样品强磁计(VSM)对样品的铁磁性进行测试,发现真空中退火的样品饱和磁化强度比空气中退火的要大得多,并经分析认为这可能是薄膜中氧缺陷引起的。Iron doped zinc oxide(ZnO∶Fe)thin films were successfully deposited on Si wafer by radio frequency magnetron sputtering method,and annealed in the vacuum and air.The microstructure was detected by X-ray diffraction(XRD),the surface/cross-section morphology was observed by scanning electron microscopy(SEM),and the ferromagnetism of the films was measured by vibrating sample magnetometer(VSM).The experimental results demonstrate that the ZnO:Fe films have a hexagonal wurtzite structure with highly c-axis preferential orientation.It is found that the annealing atmosphere has some influence on the microstructure of the film.When annealed in the air,the films show the strongest(002)diffraction peak,the grain size becomes the largest,the crystallinity and orientation of the film are obviously better.Furthermore,the ferromagnetism of ZnO:Fe films at room temperature have been proved by the results of VSM measurement.It is found that the saturation magnetization of samples in vacuum annealing was much larger than that in air,and the analysis suggests that this could be caused by oxygen defects in thin films.

关 键 词：磁控溅射 ZnO:Fe薄膜 退火气氛 铁磁性 

分 类 号：O469[理学—凝聚态物理] O484[理学—电子物理学]