基于Igor Pro实现的低成本电子束直写微加工  

Low-cost Microfabrication of Electron Beam Directly Writing Based on Igor Pro

作　　者：麦满芳 马信洲 MAI Manfang;MA Xinzhou(School of Physics and Optoelectronic Engineering,Foshan University,Foshan 528000,Guangdong,China;School of Material Science and Energy Engineering, Foshan University,Foshan 528000,Guangdong,China)

机构地区：[1]佛山科学技术学院物理与光电工程学院,广东佛山528000 [2]佛山科学技术学院材料科学与能源工程学院,广东佛山528000

出　　处：《实验室研究与探索》2018年第9期25-28,共4页Research and Exploration In Laboratory

基　　金：国家自然科学基金项目(11504242)

摘　　要：电子束直写在微纳加工领域有着非常广泛的应用。为了能够实现低成本电子束直写微加工,提出了一个基于Igor Pro的简易方法,此方法的工作原理是通过编写Igor Pro程序控制NI PCI-6251多功能板卡的电压输出,从而控制电子束的运动以实现微纳加工。结果表明,此方法能够应用于加工各种复杂的金微米结构,具有广阔的应用前景。Electron beam directly writing is widely used for micro-and nanofabrication.In order to reduce the cost of its application,a feasible method based on Igor Pro is proposed in this paper.The working principle of this method is to control the motion of an electron beam via an NI PCI-6251 multifunctional DAQ card and a user-defined Igor Pro program.To demonstrate this idea,different gold microstructures have been fabricated using this method successfully.

关 键 词：微加工 电子束直写 Igor Pro程序 虚拟仪器 金微米结构 

分 类 号：TN05[电子电信—物理电子学]