基于显微干涉的纳米探针测量系统  

Nano-probe Measurement System Based on Microscopic Interferometry

作　　者：王生怀[1,2] 吴小桐 徐风华[1] 陈育荣[1] 谢铁邦[2] WANG Sheng-huai;WU Xiao-tong;XU Feng-hua;CHEN Yu-rong;XIE Tie-bang(College of Mechanical,Hubei University of Automotive Technology,Shiyan 442002,China;College of Mechanical,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]湖北汽车工业学院机械学院,湖北十堰442002 [2]华中科技大学机械学院,湖北武汉430074

出　　处：《仪表技术与传感器》2018年第10期51-54,58,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(51475150;51275159);国家留学基金项目(201308420014);中国博士后科学基金项目(2011M501199);湖北省教育厅科研项目(D20141802;Q20171805)

摘　　要：为实现微纳米结构的定量测量和定位观察需要,设计了一种基于显微干涉的纳米探针测量系统。该系统基于干涉显微镜基体,同时融合采用白光干涉法和激光干涉法来对纳米探针的纵向位移进行测量。所构成的探针系统能与光波直接溯源,能直接观察被测区域,测量精度高。实验结果表明所设计的测量系统满足定量测量和定位观察需要。For the quantitative measurement and positioning observation of micro-nano structure,a nano-probe measurement system based on micro-interference was designed.The system was based on the interference microscope main body,and the white-light interferometry and laser interferometry were used to measure the longitudinal displacement of the nano-probe.The formed probe system can directly trace the light source and observe the measured area,and had the advantages of high measurement accuracy and so on.The results show that the designed measurement system meets the need of quantitative measurement and positioning observation.

关 键 词：纳米探针 白光干涉 激光干涉 可溯源 定位观察 

分 类 号：TH741[机械工程—光学工程]