透明衬底光致导电网栅的设计与制作  

Design and Fabrication of Photoconductive Mesh on Transparent Substrate

作　　者：王君[1] 冷雁冰[1] 孙艳军[1] 纪雪松 王丽[1] 王越 WANG Jun;LENG Yan-bing;SUN Yan-jun;JI Xue-song;WANG Li;WANG Yue(National Demonstration Center for Experimental Opto-Electronic Engineering Education,School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Liaoshen Industrial Group Co.,Ltd.,Shenyang 110045,China)

机构地区：[1]长春理工大学光电工程学院光电工程国家级实验教学示范中心,长春130022 [2]辽沈工业集团有限公司,沈阳110045

出　　处：《光子学报》2018年第9期92-98,共7页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.11474037;11474041)~~

摘　　要：依据半导体光电导效应分析了光致导电复合网栅调控机理,阐明了光致导电复合网栅的设计思路与结构特点.结合透明衬底蓝宝石基片,选取雷达波2~18GHz,红外3~12μm波段为研究对象对复合网栅结构参数进行优化和仿真,当网栅参数周期由5mm变为2.5mm、边长由4.9mm变为2.4mm时,网栅的中心谐振频率从13.2GHz变为14GHz.采用衍射光栅同轴对准原理保证两次lift-off光刻工艺的对准精度,制备的网栅周期误差小于6μm,边长误差小于5μm,满足实验要求.复合网栅的光学和电学性能测试结果为:加载复合网栅的蓝宝石衬底样件与未加载的相比,红外透过率曲线整体走势未发生变化,透过率整体下降了7.8%左右,与单独金属网栅相比相差3.4%,符合红外透过损失规律.该复合网栅在敏感波长为600nm光照射下测得的中心谐振频率从13.22GHz变为14.03GHz,与仿真结果基本一致,验证了光照对复合网栅电磁性能调控的可行性.Based on the semiconductor photoconductive effect,the mechanism of photo-induced conductive composite mesh was analyzed,and the design ideas and structural characteristics of the photo-induced conductive composite mesh were clarified.Combined with the transparent sapphire substrate,the radar wave 2~18 GHz and infrared 3~12μm wavebands were selected as the research object to optimize and simulate the parameters of the composite mesh structure.When the period of mesh parameter cycle changes from 5 mm to 2.5 mm,and the side length changes from 4.9 mm to 2.4 mm,correspondingly,the central resonance frequency of the mesh changes from 13.2 GHz to 14 GHz.The principle of coaxial alignment of diffraction gratings was used to ensure the alignment accuracy of the two lift-off lithography processes.The mesh cycle error is less than 6μm and the length error is less than 5μm,which satisfies the experimental requirements.The optical and electrical properties of the composite mesh were tested,and the results are:compared the sample without sapphire substrate with the composite mesh,the overall trend of the infrared transmittance curve did not change,and the overall transmittance decreased by about 7.8%,which is a 3.4%difference from the single metal mesh.This is in line with the law of infrared transmission loss.The central resonant frequency of the composite mesh measured at a sensitive wavelength of 600 nm is changed from 13.22 GHz to 14.03 GHz,which is basically consistent with the simulation results.Thus,the feasibility of illumination to control the electromagnetic performance of the composite grid was verified.

关 键 词：光学表面 复合网栅 光致导电 光刻 红外 

分 类 号：TN713[电子电信—电路与系统] O472.3[理学—半导体物理]