磁控溅射沉积不同掺杂非晶碳膜的摩擦学特性研究  

Research on Tribological Properties of Amorphous Carbon Films Doped with Different Materials Deposited by Magnetron Sputtering

作　　者：邹春生 李迎春[1] 邱明[1] 程蓓 周占生[1] ZOU Chunsheng;LI Yingchun;QIU Ming;CHENG Bei;ZHOU Zhansheng(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003

出　　处：《轴承》2018年第11期22-25,共4页Bearing

基　　金：河南省科技创新杰出人才计划项目(154200510013)

摘　　要：采用磁控溅射技术制备了无掺杂及掺杂Cr,WC的3种非晶碳膜,通过SEM和XRD对薄膜进行了微观形貌观察及物相分析,利用多功能材料表面性能测试仪测定了薄膜的临界破坏载荷,利用HSR-2M摩擦磨损试验机测试了薄膜在乏油环境下的摩擦学性能,并对试验后的薄膜进行了微观分析。结果表明:在乏油环境下,3种碳膜具有较低的摩擦因数和良好的抗磨性能,随着滑动速度的提高,3种非晶碳膜的摩擦因数逐渐降低;掺杂Cr提高了薄膜的磨损寿命;掺杂WC降低了薄膜与基体的临界破坏载荷及薄膜的磨损寿命。The three kinds of amorphous carbon films,doped with Cr,WC and the undoped,are prepared by using magnetron sputtering technology.The micro-morphology observation and phase analysis of thin films are carried out by using SEM and XRD.The critical fracture load of thin films is tested on a multi-functional tester for material surface properties.The tribological properties of thin films are investigated with HSR-2M friction and wear tester under starved lubrication,and the microanalysis of tested thin films is carried out.The results show that three kinds of carbon films provide low friction coefficient and excellent antiwear property under starved lubrication.The friction coefficient of three kinds of amorphous carbon films decreases with the increase of sliding speed.The wear life of thin films is improved by doping with Cr.However,doping with WC reduces critical facture load between thin films and substrates and the wear life of thin films.

关 键 词：滚动轴承 非晶碳膜 磁控溅射 摩擦磨损 掺杂 

分 类 号：TH133.3[机械工程—机械制造及自动化] TH117.1