对称三材料双栅应变硅MOSFET亚阈值电流与亚阈值斜率解析模型  

Analytical Models of Subthreshold Current and Subthreshold Slope for Symmetrical Triple-Material Double-Gate s-Si MOSFETs

作　　者：辛艳辉 袁合才 辛洋 XIN Yan-hui;YUAN He-cai;XIN Yang(Department of Information and Engineering,North China University of Water Resources and Electric Power,Zhengzhou,Henan 450046,China;Department of Mathematics and Information Science,North China University of Water Resources and Electric Power,Zhengzhou,Henan 450046,China;Water Conservancy Survey and Design Institute,Dezhou,Shandong 253014,China)

机构地区：[1]华北水利水电大学信息工程学院,河南郑州450046 [2]华北水利水电大学数学与统计学院,河南郑州450046 [3]水利勘查设计研究院,山东德州253014

出　　处：《电子学报》2018年第11期2768-2772,共5页Acta Electronica Sinica

基　　金：河南省科技公关项目(No.172102210367);华北水利水电大学高层次人才科研启动项目(No.40436)

摘　　要：基于泊松方程和边界条件,推导了对称三材料双栅应变硅金属氧化物半导体场效应晶体管(MOSFET:metal oxide semiconductor field effect transistor)的表面势解析解.利用扩散-漂移理论,在亚阈值区电流密度方程的基础上,提出了亚阈值电流与亚阈值斜率二维解析模型.分析了沟道长度、功函数差、弛豫Si Ge层的Ge组份、栅介质层的介电常数、应变硅沟道层厚度、栅介质高k层厚度和沟道掺杂浓度等参数对亚阈值性能的影响,并对亚阈值性能改进进行了分析研究.研究结果为优化器件参数提供了有意义的指导.模型解析结果与DESSIS仿真结果吻合较好.The surface potential analytical solution is derived by Poisson equation and the boundary condition for symmetrical triple-material(TM)double-gate(DG)strained-Si(s-Si)MOSFETs.Two-dimensional analytical models of subthreshold current and subthreshold slope are proposed from subthreshold current density equation based on the diffusion-drift theory.Effects of device parameters on subthreshold characteristics have been discussed and the physical mechanism has been explained.The parameters include channel length,work function difference、Ge mole fraction,permittivity of gate dielectric,strained Si film thickness,high-k layer thickness and channel doping concentration.The improvement of the subthreshold performance has been studied,which provides significant guidance to optimize the device parameters.The analytical models agree well with simulation using DESSIS.

关 键 词：亚阈值电流 亚阈值斜率 三材料双栅 应变硅 

分 类 号：TN386[电子电信—物理电子学]